The invention discloses a vertical
plasmon waveguide device structure capable of being coupled by an
optical fiber and a preparation method of the vertical
plasmon waveguide device structure, and belongs to the technical field of integrated
optoelectronics, and the structure is composed of a pair of
metal gratings and a vertical
metal-medium-
metal plasmon waveguide. The structure comprises a
silicon substrate layer, a lower metal layer, a
dielectric layer and an upper metal layer which are arranged from bottom to top and is divided into a
grating area and a waveguide area, the
grating area comprises a
dielectric grating area and a
metal grating layer, and the waveguide structure comprises the lower metal layer, the
dielectric layer and the upper metal layer. According to the design of the invention, the limitation of
mass production caused by an
overlay process of a mode converter between heterogeneous integrated waveguides is avoided, and the preparation robustness of the device is improved. The optical
insertion loss caused by the roughness of the side wall of the waveguide is improved in a
metal deposition-dielectric
spin coating-
metal deposition mode, and the
dielectric layer can be replaced to realize
multiple device functions.