70 results about "Gas chemistry" patented technology

An apparatus and a method for etching high dielectric constant (high-κ) materials using halogen containing gas and reducing gas chemistries are provided. One embodiment of the method is accomplished by etching a layer using two etch gas chemistries in separate steps. The first etch gas chemistry contain no oxygen containing gas in order to break through etching of the high dielectric constant materials, to dean any residues left from previous polysilicon etch process resulting in less high-κ foot, and also to control silicon recess problem associated with an underlying silicon oxide layer. The second over-etch gas chemistry provides a high etch selectivity for high dielectric constant materials over silicon oxide materials to be combined with low source power to further reduce silicon substrate oxidation problem.

A method of etching high dielectric constant materials using halogen gas and reducing gas chemistry. An embodiment of the method is accomplished using a 20 to 300 sccm of chlorine and 2 to 200 sccm of carbon monoxide, regulated to a total chamber pressure of 2-100 mTorr to etch a hafnium oxide layer.

A method and apparatus for plasma etching a workpiece, such as a semiconductor wafer, including a thin film stack having a top film disposed over a bottom film with an intervening middle film there between. Etch selectivity between the top and bottom films may be as low as between 1:1 and 2:1 and a first carbon-lean gas chemistry is used to etch through the top film, a second carbon-lean gas chemistry is used to etch through the middle film, and the bottom film is etched through by alternating between depositing a polymer passivation on the top film using a carbon-rich gas chemistry and an etching of the bottom film with a third carbon-lean gas chemistry, which may be the same as the first carbon-lean gas chemistry.

The invention discloses a semiconductor-typed single-walled carbon nano tube and a preparation method thereof, belonging to the carbon nano tube technical field. The carbon atoms on the tube wall of the single-walled carbon nano tube are replaced by doping atoms which comprise nitrogen atoms, boron atoms, oxygen atoms or sulfur atoms. The preparation method thereof comprises: at the reaction temperature, in an inert environment and under the catalysis of a catalyst which is positioned on substrate, the reaction gas is deposited on the substrate by chemical vapor deposition, so as to obtain the carbon nano tube; the reaction gas comprises carbon source and doped source which come from the same substance or different substances; after the chemical vapor deposition, a semiconductor-typed single-walled carbon nano tube is prepared. Compared with the prior art, the invention has the advantages of simple equipment, easy operation, low raw material cost and strong product repeatability, and can obtain single-walled carbon nano tubes which are all semiconductor-typed.

The invention provides a solar energy robot for chemistry accident treatment. The robot comprises a main supporting plate, a front supporting plate, a control box, tyres, a tyre bracket, a signal transmitting receiver, a gas chemical detector, supporting cylinders, a battery plate cylinder, a battery plate rotating motor, a motor mounting plate, an angle adjustment motor, a solar energy mounting plate, a solar energy battery plate, a sampling straw, a telescopic cylinder, a sampling detecting device, folding spray pipes, vertical spray pipes, a camcorder lens rotating motor, a camcorder lens fixing frame, an angle controlling motor, a camcorder lens, a lateral cylinder, spray head adjustment motors, a spray head, a placing frame, liquid storing tanks, a main telescopic cylinder, a spray gun head and light intensity inductors. The solar energy robot disclosed by the invention can perform corresponding treatment on an accident zone according to the corresponding detecting result and the corresponding shooting result, the treatment effect is good, the treatment efficiency is high, an angle variable solar battery plate is adopted for providing electricity, and the solar energy battery plate can change along with the angle of light, so that the absorption efficiency of solar energy is high, and the service time is long.

The invention discloses a multifunctional standard gas generator, which is mainly used for preparing low concentration standard gas with a concentration of 10<-10>-100mg/m<3> (liquid standard chemicals) or a dilution degree of 1-10<12> times (gaseous standard chemicals) so as to be suitable for instrument metering or analysis method research. A stepping motor (106-1) drives liquid standard chemicals contained in a syringe (115-1) or bottled high concentration gaseous standard chemicals into a gasification device (110) through a first adapter (109-1), zero gas is introduced through a second adapter (109-2) to conduct evaporation and dilution so as to obtain standard gas chemicals with a concentration of 10<-3>-100mg/m<3> or a dilution degree of 1-10<5> times; if a lower concentration is needed, primary standard gas stored in a second syringe (115-2) is diluted in a mixer (113), and then secondary standard gas with a concentration of 10<-10>-10<-3>mg/m<3> or a dilution degree of 10<5>-10<12> times can be output through the third adapter (109-3).

The invention relates to a preparation device and a manufacturing method for a high-pollution-resistance type symmetrical polyvinylidene fluoride (PVDF) hollow fiber porous membrane. The device comprises a membrane liquid pretreatment apparatus, a spinning box, a gas passage, a passage atmosphere control system, a coagulating bath and a potcher, and a preparation process combining vapor phase gelation and immersion gelation is adopted. The device provided by the invention, designed with a reasonable passage and a reasonable passage atmosphere adjusting system, can realize adjustment of the temperature, humidity and chemical composition of gas in the passage. Nascent fibers extruded out of a spinning head are firstly subjected to vapor induced phase separation to preliminarily generate microporous phase separation so as to form a high-porosity surface, and a membrane filament with a high aperture ratio has an overall asymmetric cell-like structure after consolidation forming. The invention can achieve stage control of pore diameter distribution of a surface and a support layer, and a membrane pollution experiment shows that the overall asymmetric structure with good integrality and a surface separation layer with a high aperture ratio and narrow pore diameter distribution have higher pollution resistance.

The invention relates to methods, systems and apparatus for distributed management of raw water and internal combustion engine (ICE) gas emissions generated during industrial operations. One aspect of the invention at least partially utilizes a hot gas air knife to increase or partially increase surface area between a raw water and a hot gas in order to vaporize a proportion of the aqueous phase of the raw water and concentrate contaminants within a residual raw water concentrate. The water vapor generated by the vaporization process may be demisted, discharged directly to the atmosphere or alternatively condensed and captured for use. Another aspect relates to how the liquids and gasses interact to continuously flush the surfaces of the system which may help mitigate scaling issues. The invention may help facilitate rapid transfer of ICE combustion gas particulate and ICE combustion gas chemicals onto and into the raw water as it concentrates.

A method for etching an organic anti-reflective coating (OARC) using a halogen-free gas chemistry is disclosed. The organic anti-reflective coating (OARC) is etched using a gas mixture comprising at least one of a hydrocarbon-containing gas and an oxygen-containing gas. The method provides high etch selectivity for the organic anti-reflective coating (OARC) over metal layers (e.g., copper (Cu), aluminum (Al), and the like) or dielectric layers (silicon dioxide (SiO₂), and the like).

A plasma processing system for processing a substrate, is disclosed. The plasma processing system includes a single chamber, substantially azimuthally symmetric plasma processing chamber within which a plasma is both ignited and sustained for the processing. The plasma processing chamber has no separate plasma generation chamber. The plasma processing chamber has an upper end and a lower end. The plasma processing chamber includes a material that does not substantially react with the reactive gas chemistries that are delivered into the plasma processing chamber. In addition, the reactant gases that are flown into the plasma processing chamber are disclosed.

The disclosed technology relates to nanotechnology, petrochemistry, gas chemistry, coal chemistry, in particular to a catalyst based on carbon nanotubes for synthesis of hydrocarbons from CO and H₂ and a preparation method thereof. The carbon nanotubes fixed in the catalyst pellet pores improve mass and heat transfer in the catalyst pellet and the catalyst bed.

The invention relates to the field of gas chemistry and, more specifically, to methods and devices for producing aromatic hydrocarbons from natural gas, which involve producing synthesis gas, converting same into methanol, producing, from the methanol, in the presence of a catalyst, a concentrate of aromatic hydrocarbons and water, separating the water, air stripping hydrocarbon residues from the water, and separating-out the resultant concentrate of aromatic hydrocarbons and hydrogen-containing gas, the latter being at least partially used in the production of synthesis gas to adjust the ratio therein of H₂:CO 1.8-2.3:1, and can be used for producing aromatic hydrocarbons. According to the invention, the production of aromatic hydrocarbons from methanol in the presence of a catalyst is carried out in two consecutively-connected reactors for synthesizing aromatic hydrocarbons: in a first, low-temperature isothermal reactor for synthesizing aromatic and aliphatic hydrocarbons, and in a second, high-temperature adiabatic reactor for synthesizing aromatic and aliphatic hydrocarbons from aliphatic hydrocarbons formed in the first reactor, and the subsequent stabilization thereof in an aromatic hydrocarbon concentrate stabilization unit. At least a portion of the hydrogen-containing gas is fed to a synthesis gas production unit and is used for producing synthesis gas using autothermal reforming technology. The installation carries out the method. The achieved technical result consists in increasing the efficiency of producing concentrates of aromatic hydrocarbons.

The invention relates to an air purifying device which comprises a first water purifying module, a photo-catalytic module, a second water purifying module and a spraying module, wherein the first water purifying module comprises a first purifying water tank and an air inlet pipe which is used for connecting water in the first purifying water tank with the exterior; a first axial flow fan is arranged in the air inlet pipe; a water atomizer is arranged on the upward side in the first purifying water tank; the photo-catalytic module is arranged above the first water purifying module; the upward side of the first purifying water tank is communicated with the downward side in the photo-catalytic module through a first air outlet pipe; at least one nanometer TiO2 diaphragm and an ultraviolet ray light source are arranged above the end part of the first air outlet pipe in the photo-catalytic module; the second water purifying module comprises a second purifying water tank and a second air outlet pipe; an air outlet is formed in the upper part of the second purifying water tank. The air purifying device has the advantages that the process of purifying fine particle pollutants PM2.5 and chemical gas pollutants in air is simple, the air purifying effect is good, the air purifying device has a function of continuously humidifying air, the cost is low and the air purifying device can be easily popularized.

The invention relates to a gas chemical instability intelligent test device, comprising a test container, an electronic ignition device, a temperature control module, a pressure control module, an energy recording module and a control terminal, wherein a gas inlet and a gas outlet are arranged at the top of the test container, a closed test space is formed in the test container by fixing bolts, an electric heater and a heat-insulation layer are sequentially arranged outside the test container and are connected with a pressure sensor and an in-container temperature sensor, and the in-container temperature sensor and a heater sensor regulate test temperature under the control of a temperature sensing control module. After ignition, gas chemical instability can be determined through recording of pressure in the test container. A T-shaped gas guide pipe is connected with the gas outlet, one end of the T-shaped gas guide pipe is connected with an explosion disk fixing nut, and the other end of the T-shaped gas guide pipe is connected with a gas outlet pipeline; and the gas outlet pipeline is provided with a direct exhaust branch and an exhaust branch with a vacuum pump. After reaction, the pressure of test gas in the test container rises up, and when the pressure is higher than a safe pressure value, an explosion disk is exploded automatically to release pressure.

A method of etching silicon using a chlorine and sulfur dioxide gas chemistry. An embodiment of the method is accomplished using a 20 to 300 sccm of chlorine and 2 to 100 sccm of sulfur dioxide, regulated to a total chamber pressure of 2-100 mTorr.

The invention discloses water-based plastic gravure table printing ink. In order to solve the defects existing in the prior art, the specific procedure comprises the following steps that S1, materialsare prepared, specifically, resin materials comprise s-90 acrylic resin (Hanwha), 7159 emulsion (basf) and 7266 emulsion (basf); pigment materials comprise bronze red pr53:1 (Hangzhou lily), magentapr57:1 (Changzhou Beimei), bright red pr48:2 (Changzhou beimei), titanium dioxide 996 (longmang), permanent yellow py14 (Longkou taihang), 15:3 bocour blue (Zhengyan) and extra black 6500; assistantscomprise 180 defoaming agent (Tongxiang hongye), 1488 defoaming agent (tego), 104E leveling agent (gas chemistry), 760W dispersing agent (Digao), 0251 wax powder (Tianshi), dc-51 slipping agent (America Dow Corning), a fast drying agent (Guangzhou Duwei) and the like; solvents comprise deionized water, 95% ethyl alcohol, an environment-friendly ether solvent, ammonium hydroxide (28%), monoethanolamine and the like; and S2, the weight rate of the formula is that the weight rate of organic or inorganic pigment is 10-15, and the weight rate of extender pigment is 1-3.