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67 results about "Polarized spectroscopy" patented technology

Elliptical polarization spectrum real-time monitoring method for growth of metal film

InactiveCN105734521AAccurate valueReal-time monitoring of growth processVacuum evaporation coatingSputtering coatingGratingGas phase
The invention relates to a method for real-time monitoring of metal film growth ellipsoidal polarization spectrum. The integrated structure of the vacuum coating sample stage and the real-time monitoring system of the ellipsoidal polarization spectrum is adopted; the optical fiber coupler, the optical fiber alignment system, the small hole optical block, the stepping motor, the angle encoder, the polarizer, the analyzer, The fiber optic spectrometer is packaged in two left and right sealed boxes respectively; the composite light is input into one of the above-mentioned sealed boxes by optical fiber, and then the linearly polarized spectral beam is output from the exit hole, and is incident on the sample surface according to a given incident angle. After being reflected or transmitted into another above-mentioned sealed box, the reflected polarized spectral beam or transmitted polarized spectral beam carrying film information is detected in real time and fed back to the coating equipment system for real-time monitoring. The real-time monitoring method of the ellipsoidal polarization spectrum is suitable for various vacuum coating systems such as magnetron sputtering coating systems and plasma enhanced chemical vapor deposition coating systems and the like.
Owner:BEIHANG UNIV

Novel snapshot type polarization spectral imaging system with adjustable multi-dimensional parameters

ActiveCN113188660AFlexible Modulation SpaceFlexible modulation of spectral resolutionPolarisation spectroscopyGratingMicroscope objective
The invention discloses a novel snapshot type polarization spectral imaging system with adjustable multi-dimensional parameters. The system is composed of an objective lens, a collimating mirror, a light splitting grating, a convergent mirror A, a digital micromirror device (DMD), a convergent mirror B, a light combining grating, a sub-aperture polarization assembly, a charge coupled device (CCD) and a computer. The polarization spectrum system controls the reflection direction of a code element corresponding to a coding matrix to carry out spectrum resolution modulation based on a programmable function of the DMD, carries out polarization state modulation of measured light through a sub-aperture polarization assembly, and carries out spatial resolution modulation by adopting a CCD pixel merging method. And finally, flexible modulation of multi-dimensional parameters of the novel snapshot polarization spectrum system is realized. The imaging system has the capability of flexibly modulating the spatial resolution, the spectral resolution and the polarization state of the target, and is beneficial to obtaining a proper multi-dimensional parameter combination detection mode under a certain detection condition so as to reduce the influence of the spectral resolution, the spatial scale effect and the atmospheric effect on the detection precision.
Owner:BEIHANG UNIV

Off-axis three-mirror full-spectrum polarization spectral imaging detection device

ActiveCN113701885ARealize multispectral polarization imaging detectionImprove the probability of target detection and recognitionPolarisation spectroscopyBeam splitterImaging quality
The invention discloses an off-axis three-mirror full-spectrum polarization spectral imaging detection device, and belongs to the field of photoelectric detection. The off-axis three-mirror full-spectrum polarization spectral imaging detection device comprises an off-axis three-mirror optical system, a multi-spectrum beam splitter, a long-wave polarization spectral imaging detection system, a medium-wave polarization spectral imaging detection system, a near-infrared polarization spectral imaging detection system, a visible light polarization spectral imaging detection system and an image fusion processing system. The invention combines intensity imaging, spectral imaging and polarization imaging technologies, provides an off-axis three-mirror full-spectrum polarization spectral imaging detection device, and realizes high-definition and high-resolution photoelectric imaging detection in hazy weather. Polarization, spectrum and intensity information of four spectrum bands of visible light, near-infrared, medium-wave infrared and long-wave infrared can be obtained at the same time, and the device is a beneficial supplement for traditional imaging detection. Strength, spectrum and polarization information are combined, the target detection and recognition probability is improved by more than 25%, the method can be applied to the technical field of photoelectric detection, and the imaging quality is improved.
Owner:CHANGCHUN UNIV OF SCI & TECH

Reflection-type near-field optical polarization spectrometer

PendingCN113739919ANon-destructiveMeet the needs of precise measurement of nanometer sizePolarisation spectroscopyPolarisation-affecting propertiesOptical spectrometerImage resolution
The invention relates to a reflection-type near-field optical polarization spectrometer. The spectrometer comprises an incident light generation module, a probe scanning microscopic module and an emergent light detection module; detection light is shaped and modulated in the incident light generation module, so that detection light in different polarization states is emitted; an incident light beam is focused on a probe tip of the probe scanning microscopic module; the detection light interacts with a micro-nano space structure formed by the probe tip and the surface of a sample, the polarization state of the detection light changes, and then the reflected light/scattered light of the light beam is collected by the emergent light detection module and then is shaped and focused. According to the reflection-type near-field optical polarization spectrometer of the invention, nanoscale ultrahigh transverse spatial resolution can be realized, and the requirement of a semiconductor key device for nanoscale size accurate measurement is met; the defocusing problem caused by chromatic aberration generated by using a lens element can be avoided; a polarization-maintaining structure can ensure that the polarization state of the modulated detection light is kept unchanged when the modulated detection light reaches a probe after being reflected by a reflecting element; and the spectrometer has the advantages of no contact with the sample, no damage to the sample and the like.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Silicon-based infrared polarization spectrum chip based on up-conversion film and pixelated polarization metamaterial, and preparation method of up-conversion film

The invention discloses a silicon-based infrared polarization spectrum chip based on an up-conversion film and a pixelated polarization metamaterial, and a preparation method of the up-conversion film. The polarization spectrum chip comprises an optical focusing micro-lens array, a pixelated polarization metamaterial array, an up-conversion film and a photoelectric conversion substrate. The methodfor manufacturing the up-conversion film comprises the steps of material preparation, ultrasonic dispersion, magnetic stirring, spin-coating and spin-coating, heating and baking, observation and precipitation, film sealing and the like. According to the invention, the chip and the preparation working mode have the advantages that the overall production process is simple and mature, the weight andsize of a detection system are greatly reduced, the structural complexity of an optical-mechanical system is far lower than that of an infrared polarization imaging device based on an existing technical scheme, and miniaturization of the system is facilitated; and the pixel polarization metamaterial array is adopted, moving parts do not exist, and compared with a traditional mode that a polarization wheel or a wave plate needs to be rotated, the stability is very good.
Owner:CHANGCHUN UNIV OF SCI & TECH

Polarization spectrum imaging device and method based on M-Z interference

The invention belongs to a polarization spectrum imaging device and method. The objective of the invention is to solve the problems that existing polarization spectrum imaging detection systems and corresponding methods have problems or cannot be used for real-time measurement of a dynamic target, or are not suitable for measurement conditions of rapid change of polarization state information, ora slit needs to be arranged in the detection system. The invention provides a polarization spectrum imaging device and method based on M-Z interference. The device comprises a collecting and processing unit, and a front optical telescopic system, an interference light splitting system and a polarization light splitting system sequentially arranged. The imaging method is based on the device, targetreflected light is collected by the front lens group and the field diaphragm in a front-mounted mode, the field is adjusted, then the target reflected light is collimated and emitted by the collimating lens group, and after passing through the beam splitter, the reflected light is reflected by the first reflector and the second reflector in sequence, penetrates through the beam splitter and enters the Fourier mirror array. The transmission light is reflected by the third reflector, the fourth reflector and the beam splitter in sequence and then enters the Fourier mirror array, and polarization interference fringes are generated on the detector through the polarization diaphragm.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Polarized light sensitive long-wave infrared sub-wavelength grating MDM trapezoidal structure absorber

The invention discloses a polarized light sensitive long-wave infrared sub-wavelength grating MDM trapezoidal structure absorber. The structure absorber comprises a zinc sulfide substrate, wherein the bottom of the substrate is plated with an aluminum film, and an upper portion of the substrate is plated with a trapezoidal grating structure layer sequentially comprising an aluminum film, a zinc selenide film, an aluminum film, a germanium film and an aluminum film from bottom to top. According to the structure absorber, a processing technology combining photoetching, etching and film coating is adopted, translation regulation and control of the central wavelength of an absorption peak can be realized only by changing the duty ratio or period of the micro-nano structure, ultra-wide-angle narrow-band high absorption is realized under multiple azimuth angles, and simultaneous processing and preparation are realized for the same film layer of multiple groups of strip micro-nano structures in a full array area; problems that in a traditional coating process, due to the fact that coating is conducted for multiple times in a time-division and area-division mode, the order of magnitude of the number of times of coating is increased, and the relative parallelism of dissimilatory coating of multiple strips is difficult to guarantee are solved, machining efficiency is improved, machining and preparing difficulty and complexity of the polarization spectrum light splitting device in the full-array area are reduced, and innovative significance is achieved.
Owner:JILIN UNIV

A kind of polyethylene film and preparation method thereof

The invention relates to the field of films and discloses a polyethylene film and a preparation method thereof. The infrared polarization spectrum of the polyethylene film has characteristic absorption peaks at positions of 720 cm<-1> and 731 cm<-1>, d A<parallel>(lambda) is used to represent the infrared absorption degree of the film in a wavelength position of lambda when infrared polarized light is parallel to the longitudinal direction of the film, and A<perpendicular>(lambda) is used to represent the infrared absorption degree of the film at a wavelength position of lambda when infrared polarized light is perpendicular to the longitudinal direction of the film, D<lambda> is equal to the ratio of the A<parallel>(lambda) to the A<perpendicular>(lambda), E is equal to the ratio of A<parallel>(731) to A<parallel>(720), F is equal to the ratio of A<perpendicular>(731) to A<perpendicular>(720),D<720> is equal to or larger than 0.083 and is equal to or smaller than 0.83, D<731> is equalto or larger than 0.1 and is equal to or smaller than 1, E is equal to or larger than 0.5 and is equal to or smaller than 1.8, and F is equal to or larger than 0.4 and is equal to or smaller than 1.2.The polyethylene film provided by the invention has high anti-puncture strength, does not need filling particles, and is a single-layer film instead of a multi-layer composite film. The preparation process is simple and has great industrial application prospects.
Owner:CHNA ENERGY INVESTMENT CORP LTD +1

Method for measuring elliptical polarization spectrum under packaging condition

ActiveCN113654995AAvoiding Difficulties in Multiparameter FittingUniversalPolarisation-affecting propertiesSpectroscopic ellipsometryPolarized spectroscopy
The invention discloses a method for measuring an elliptical polarization spectrum under a packaging condition, which comprises the following steps of measuring the width delta of a detector, the diameter d of a light beam, the imprecise refractive index n of a packaging layer and an incident angle alpha, taking the larger value max {d, delta} of delta and d as w, and calculating the minimum value of the thickness of the packaging layer; measuring an elliptical polarization spectrum of the upper surface of the packaging layer, collecting a ratio rho of a p polarization component to an s polarization component of the reflected light from an ellipsometer, and calculating a dielectric function epsilons of the packaging layer; and measuring a refraction angle beta of the packaging substrate, and calculating an air layer parameter T between the packaging substrate and the measured material and a dielectric function epsilon m of a single-layer bulk phase material under a packaging condition. According to the method, the dielectric property of the packaging layer does not need to be known in advance, the difficulty of carrying out multi-parameter fitting on the dielectric property of the packaging layer is avoided, errors introduced by the packaging layer are completely eliminated, and the method is suitable for elliptical polarization spectrum testing under various packaging conditions such as different substrate packaging, vacuum box packaging and liquid phase packaging and has certain universality.
Owner:NANJING UNIV

Ultra-compact snapshot type polarization spectrum imaging detection device and detection method

The invention discloses an ultra-compact snapshot type polarization imaging detecting device and a detecting method. The detecting device comprises a lens array and a detector which are successively arranged in an incident light direction. A polarizing interferometer is arranged between the lens array and the detector or is arranged in front of the lens array. The polarizing interferometer comprises a line polarizer, a single-wedge-shaped birefringence prism with a wedge angle of beta and a line analyzer. The transmission directions of the line polarizer and the line analyzer are same and areat an angle of 45 DEG to the quick axis direction of the single-wedge-shaped birefringence prism. The line polarizer is arranged in front of the single-wedge-shaped birefringence prism. The light sensing surface of the detector is in the back focal plane of the lens array. The detector of the detecting device can acquire an interference image array of different corresponding light path differencesin one exposure period, thereby realizing no requirement for sampling of interference images which are symmetric relative to a zero light path difference. The number of the interference images is farsmaller than the sampling number required for satisfying a Nyquist's theorem. Spatial resolution is improved, and a polarization spectrum image with high spectrum resolution can be reconstructed by means of a compressed sensing algorithm.
Owner:XI AN JIAOTONG UNIV

A polarization-sensitive long-wave infrared subwavelength grating mdm trapezoidal absorber

The invention discloses a polarized light-sensitive long-wave infrared subwavelength grating MDM trapezoidal structure absorber, comprising a zinc sulfide substrate, the bottom of the substrate is plated with an aluminum film, and the upper part of the substrate is plated with aluminum film, selenization from bottom to top. The trapezoidal grating structure layer of zinc film, aluminum film, germanium film and aluminum film; the invention adopts the processing technology of photolithography, etching and coating, and can realize absorption only by changing the duty ratio or period of the micro-nano structure The translation regulation of the peak center wavelength, and the realization of ultra-wide-angle narrow-band high absorption under multi-azimuth angles, in the comprehensive array area, for the same film layer of multiple groups of striped micro-nano structures, to achieve simultaneous processing and preparation. It overcomes the problems of the order of magnitude increase in the number of coatings caused by multiple coatings in time-division and regional areas in the traditional coating process, and the difficulty of ensuring the relative parallelism of the multi-strip dissimilar coatings, improving the processing efficiency and reducing the polarization spectrum in the full array area. The difficulty and complexity of the fabrication of spectroscopic devices is of innovative significance.
Owner:JILIN UNIV

Coupling dual-wavelength laser frequency stabilization light path system and method based on polarization spectroscopy

The invention relates to a coupling dual-wavelength laser frequency stabilization light path system and method based on polarization spectroscopy. A first half-wave plate is arranged on a light path of a first laser. A first polarization beam splitter prism is arranged on a light path of the first laser passing through the first half-wave plate and used for splitting the first laser into detection light and pump light. A chopper is arranged on a light path of the pump light. A quarter-wave plate is arranged on a light path of the pump light passing through the chopper. A dichroscope is arranged on the light path of the pump light passing through the quarter-wave plate, is arranged on the light path of the second laser and is used for combining the pump light and the second laser to form combined light. A hollow cathode lamp is arranged on the light path of the combined light and the light path of the detection light. The cross point of the combined light and the detection light is at the central position of the hollow cathode lamp. A second half-wave plate is arranged on a light path of the detection light passing through the hollow cathode lamp. A photoelectric detector is arranged on a light path of the detection light passing through the second half-wave plate.
Owner:TSINGHUA UNIV

Haze transmission medium target polarization spectrum testing device and using method thereof

ActiveCN111912792AReal-time qualitative and quantitative analysisReal-time acquisition of polarization spectrumPolarisation-affecting propertiesPolarisation spectroscopyLaser detectionOptical polarization
The invention discloses a haze transmission medium target polarization spectrum testing device and a using method, belongs to the field of polarization spectrum detection, and particularly relates toa polarization spectrum laser detection method in a haze environment. The device comprises an active light source module, a simulated haze generation module is arranged on one side of the active lightsource module, an aspheric haze medium preparation module is arranged on one side of the simulated haze generation module, and a polarization spectrum measurement module is arranged on the other sideof the simulated haze generation module; a first optical window and a second optical window are arranged on the side wall of the simulated haze generation module, the first optical window directly faces the active light source module, the second optical window directly faces the polarization spectrum measurement module, and a particle monitoring device is arranged between the first optical windowand the second optical window; and the active light source module and the polarization spectrum measurement module are electrically connected with the computer system. According to the invention, thespectral polarization characteristics of haze particles under different visibility conditions can be qualitatively and quantitatively obtained.
Owner:CHANGCHUN UNIV OF SCI & TECH

A near-infrared polarization spectroscopy testing device and method

The invention discloses a near-infrared polarization spectrum test device and method, specifically relates to the field of optical communication of a near-infrared waveband, and solves the defect thata conventional channel modulation technology fails to satisfy polarization spectrum tests of narrow-band optical signals of laser sources and DWDM combined light sources in high-speed optical communication. The near-infrared polarization spectrum test device comprises a collimating objective lens, a high-speed polarization modulation assembly, a collecting objective lens and an infrared scanningmonochromator arranged in sequence along the direction of an optical path, the high-speed polarization modulation assembly and the infrared scanning monochromator are connected with a control and dataprocessing system, the high-speed polarization modulation assembly comprises a first liquid crystal modulation phase retarder, a second liquid crystal modulation phase retarder and a near-infrared polaroid arranged in sequence along an optical axis, and the infrared scanning monochromator comprises an incidence slit, a polarizing beam splitter, a wide-spectrum-band quarter-wave plate, a reflective collimating objective lens, a planar holographic grating, a rotation stepping motor, a reflective collecting objective lens, a reflection slit and a single-point detector arranged in sequence alongthe optical axis.
Owner:CHINA ELECTRONIS TECH INSTR CO LTD

A Polarized Hyperspectral Observation System for Natural Water Surface

The present invention relates to a polarization hyperspectral observation system of natural water body and sea surface. The purpose is to realize in-situ observation of polarization hyperspectrum of natural water body, to detect the change law of polarization characteristics of visible light in the process of radiation transmission of natural water body, and to clarify the characteristics of ionized water radiation polarization spectrum and Intrinsic relationship between water color elements. In the present invention, three first hyperspectral radiance sensors, three second hyperspectral irradiance sensors and one hyperspectral irradiance sensor are arranged on the rotating pan-tilt assembly to realize 360-degree comprehensive observation, and at the same time, three hyperspectral irradiance sensors A linear polarizer is set at the detection ports of one hyperspectral radiance sensor and three second hyperspectral radiance sensors to realize on-site observation at different altitude angles, which can effectively avoid the sun's glare and pollution, and suppress sky diffuse. It can accurately measure the polarization spectrum of water-leaving radiation, and complete the polarization spectrum measurement of different observation geometries of natural water bodies.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Polarization characteristic analysis method for coated optical lens based on Mueller matrix

The invention discloses a method for analyzing polarization characteristics of a coated optical lens based on a Mueller matrix, relates to the field of optical system analysis, and solves the problem that the polarization characteristics of an optical system cannot be calculated and improved in a design stage in the prior art. According to the method, Mueller matrix analysis models of different mirror surfaces and surface film systems of the whole optical system are sequentially established in the actual light propagation direction through forward derivation, by means of the research result of the method, the Mueller matrix representation form of the whole optical system can be obtained in a Mueller matrix multiplication mode, and the polarization characteristic of the whole optical system is analyzed; and the independent polarization influence can be researched by analyzing the Mueller matrix of each mirror surface and film system, and targeted improved design is carried out, so that the design and optimization of the optical system with large field of view, wide band and low polarization characteristic can be finally realized. The method has important theoretical significance and engineering value for high-precision design and quantitative application of the polarization spectrum remote sensing instrument.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Snapshot type polarization spectrum imaging method and device

The invention relates to a snapshot type polarization spectrum imaging method and device, thereby solving technical problems that in the prior art, a spectral imaging method or device does not meet the requirements for dynamic target detection and real-time detection, the time-sharing period of polarization state measurement is long, the spectral aliasing phenomenon is caused, and the energy utilization rate is not high. The snapshot type polarization spectrum imaging method comprises the steps that target light is collimated and then the collimated light is interfered through an F-P interferometer, the F-P interferometer is continuously and finely adjusted, then a polarization spectrum image with a continuously-changed spectrum band is obtained and output, and then the polarization spectrum image is collected; and thus the capability of snapshot type polarization spectrum acquisition is realized. Therefore, the invention further provides a snapshot type polarization spectrum imaging device for realizing the method, and the snapshot type polarization spectrum imaging device does not have a large-stroke moving part, has very good stability, and does not need to rotate a polarizationwheel or a wave plate in a traditional mode.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Near-field optical polarization spectrometer

The invention discloses a near-field optical polarization spectrometer. The near-field optical polarization spectrometer comprises an incident light generation module, a probe scanning microscopic module and an emergent light detection module; the incident light generation module emits detection light in different polarization states; an incident light beam enters a probe tip of the probe scanning microscopic module; the detection light interacts with a micro-nano space structure formed by the probe tip and a surface of a sample, the polarization state of the detection light changes, then scattered light, transmission light or reflected light of the light beam is collected by the emergent light detection module; the change information generated by the polarization state in the interaction is obtained by demodulating the polarization state of emergent light; inversion calculation is carried out on the information to obtain related information of the tested sample. According to the spectrometer of the invention, nanoscale ultrahigh transverse spatial resolution can be realized, the requirement of a semiconductor key device for precise measurement of nanoscale dimensions is met. The spectrometer has the advantages of non contact with the sample, no damage to the sample and the like.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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