The invention discloses a
heat flux sensor. The
heat flux sensor comprises electrodes and a measuring head, wherein the electrodes and the measuring head are integrally sintered, a
thermopile is directly deposited on a measuring face of the measuring head, and the two ends of the
thermopile are deposited on end faces of the electrodes respectively; the
thermopile comprises multiple
thermocouple units connected in series, and each
thermocouple unit comprises a cold node and a hot node which are connected with each other; a
thermal resistance layer is deposited on the measuring face; one part ofeach cold node and one part of each hot node are both arranged between the
thermal resistance layer and the measuring face; and protective films are deposited on the thermopile and the
thermal resistance layer respectively. The
heat flux sensor has the advantages of being high in response speed, high in sensitivity, simple in structure and the like. The invention further discloses a preparation method. The preparation method comprises the steps that S01, the electrodes,
ceramic and glass
powder are sintered to prepare an integrated structure; S02,
film coating is directly performed on the measuring face through an
ion beam
sputtering process to form the thermopile and the thermal resistance layer; and S03, the protective films are deposited. The preparation method has the advantages of being simple in process and the like.