The invention discloses a
sintering method of an aluminum
oxide electrostatic chuck, and belongs to the technical field of electrostatic chucks, and the
sintering method comprises the following steps: S1, preparing an insulating layer substrate from raw materials and a multilayer structure, depositing an
electrode layer on the insulating layer substrate,
coating the
electrode layer with aluminum
oxide nano
powder to form a
dielectric layer, and spraying a
silicon carbide coating on the surface of the
dielectric layer to form the multilayer structure; s2, primary
sintering is conducted, specifically, the multi-layer structure is placed in a
vacuum sintering furnace to be subjected to primary sintering; s3, secondary sintering is conducted, specifically, the multi-layer structure obtained after primary sintering is subjected to secondary sintering through the
pulse discharge plasma sintering technology, and cooling is conducted after secondary sintering; s4, the heat-conducting glue is attached to and integrated with the cooling base, the bottom of the
insulation layer base body obtained after secondary sintering of the multi-layer structure is coated with the heat-conducting glue, the
insulation layer base body and the cooling base are pressed, the electrostatic chuck is manufactured, and
plasma cleaning is conducted on the surface of the electrostatic chuck; and S5, performing performance optimization treatment, namely performing high-
voltage corona treatment on the electrostatic chuck.