The invention discloses a
wafer transfer debugging
system and method for a furnace tube annealing process. The
system comprises a
wafer transfer device, a sensor detection device, a platform control device, a
wafer to be debugged and a wafer boat, the wafer conveying device comprises a power device and a conveying arm, and the power device drives the conveying arm and the sensor detection device to move in the horizontal direction or the vertical direction; the sensor detection device comprises at least two groups of
laser sensors which are respectively used for determining the positions of boat teeth of the wafer boat and measuring the distances from the
laser sensors to the conveying arm and / or the wafer to be debugged; and the platform controller adjusts the wafer conveying position of the conveying arm according to the obtained position and distance information and records and stores the adjusted position parameters. According to the wafer conveying device, the sensor detection device is arranged to adjust and determine the wafer conveying position of the conveying arm, repeated debugging is not needed, the
operation time and cost are saved, and wafer conveying of a single wafer and double bonded wafers on the same equipment can be met without causing wafer collision.