The utility model provides a kind of
ion grinding high-resolution in-situ microscopic analysis device, the
ion grinding high-resolution in-situ microscopic analysis device includes
vacuum chamber;Sample stage for carrying the sample to be measured is set in
vacuum chamber;
Ion grinding unit, the
ion grinding unit includes the
ion beam emission end extended into
vacuum chamber;High-resolution in-situ microscopic analysis unit, the high-resolution in-situ microscopic analysis unit includes the
image acquisition end extended into vacuum chamber;And with the processor of high-resolution in-situ microscopic analysis unit
electrical connection;The ion grinding unit is used to emit
ion beam to the sample to be measured and is ground, obtains the target cross section of target area;The high-resolution in-situ microscopic analysis unit is used to obtain the two-dimensional image of the target cross section;The processor is used to carry out three-dimensional reconstruction to the two-dimensional image, obtains the three-dimensional imaging of the target area.