The utility model discloses a comprehensive
control system for gas used in a
single crystal furnace, which comprises a
single crystal furnace, an
argon supply subsystem, a
tail gas
recovery subsystem and a gas replacement subsystem, and the
single crystal furnace is divided into a main chamber and an auxiliary chamber through an isolating valve. And the
argon supply subsystem comprises an
argon recovery pure argon rectification device, a high-purity argon
buffer tank, a first filter and a pressure reducing valve, and is connected with the main chamber and the auxiliary chamber through a
gas supply main pipeline. The
tail gas
recovery subsystem comprises a main pump, an auxiliary pump, a first dust remover, a second dust remover, a
gas holder and an argon recovery catalytic purification device. And the gas replacement subsystem comprises an argon recovery high-
nitrogen rectification device, a high-purity
nitrogen buffer tank, a second filter and a high-purity
nitrogen supply pipeline. Compared with the prior art, the device has the advantages that the device has excellent performance in the aspects of gas replacement and
gas supply, and a more reliable and economical gas control solution is provided for production of the single
crystal furnace.