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Polycarbonyl, (also known as polymeric-CO, p-CO or poly-CO) is a solid metastable and explosive polymer of carbon monoxide. The polymer is produced by exposing carbon monoxide to high pressures. The structure of the solid appears amorphous, but may include a zig zag of equally spaced CO groups.
A diazonium naphthoquinone type photosensitive compound and its application in photoresist preparation
The present application relates to a photosensitive compound for G / I line photoresist, which is composed of polycarbonyl enol compound and diazonaphthoquinone sulfonyl group. The present application also provides a synthesis method of the photosensitive compound, by which a diazonaphthoquinone sulfonate photosensitive compound with excellent performance can be prepared, and the component ratio of the photosensitive compound can be adjusted arbitrarily. The present application also provides the application of the photosensitive compound in photoresist configuration, and the configured photoresist has good performance.
Owner:HUBEI SINOPHORUS ELECTRONIC MATERIALS CO LTD