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121results about How to "High degree of processing" patented technology

Method and apparatus for improved plasma processing uniformity

A method and apparatus for generating and controlling a plasma (130) formed in a capacitively coupled plasma system (100) having a plasma electrode (140) and a bias electrode in the form of a workpiece support member (170), wherein the plasma electrode is unitary and has multiple regions (Ri) defined by a plurality of RF power feed lines (156) and the RF power delivered thereto. The electrode regions may also be defined as electrode segments (420) separated by insulators (426). A set of process parameters A={n, τi, Φi, Pi, S; Li} is defined; wherein n is the number of RF feed lines connected to the electrode upper surface at locations Li, τi is the on-time of the RF power for the ith RF feed line, Φi is the phase of the ith RF feed line relative to a select one of the other RF feed lines, Pi is the RF power delivered to the electrode through the ith RF feed line at location Li, and S is the sequencing of RF power to the electrode through the RF feed lines. One or more of these parameters are adjusted so that operation of the plasma system results in a workpiece (176) being processed with a desired amount or degree of process uniformity.
Owner:TOKYO ELECTRON LTD

Market management system

A market management system is designed to manage energy industry standardized transactions between energy providers and utility distribution customers. The system includes business process and transaction validations along with transaction tracking. The market management system processes transactions in its own data format but stores the transactions in a client's customer information system (CIS) using the CIS's data format. Using only the CIS database for transaction storage eliminates the need to synchronize transaction records in the CIS database with records in a market management database. Exception management is integrated with the CIS to eliminate duplication of effort. The market management system's functionality is scalable such that varying levels of service may be provided to customers. Predetermined business rules may be customized for the purpose of validating transactions.
Owner:ADS ALLIANCE DATA SYST

Workflow control system of project implementation

InactiveCN103177306AReduce riskEasy to controlResourcesCommunications managementProject risk management
The invention provides a workflow control system of project implementation. The workflow control system comprises a project range management module, a project human resource management module, a project progress management module, a project cost management module, a project quality management module, a project health safe environment HSE management module, a project procurement management module, a project communication management module, a project risk management module and a project comprehensive management module. By means of the workflow control system, workflow control efficiency can be improved, and requirements of all aspects on information sharing are met.
Owner:CHINA CAMC ENG

Adjusting of a non-silicon fraction in a semiconductor alloy during transistor fabrication by an intermediate oxidation process

The concentration of a non-silicon species in a semiconductor alloy, such as a silicon / germanium alloy, may be increased after a selective epitaxial growth process by oxidizing a portion of the semiconductor alloy and removing the oxidized portion. During the oxidation, preferably the silicon species may react to form a silicon dioxide material while the germanium species may be driven into the remaining semiconductor alloy, thereby increasing the concentration thereof. Consequently, the threshold adjustment of sophisticated transistors may be accomplished with enhanced process uniformity on the basis of a given parameter setting for the epitaxial growth process while nevertheless providing a high degree of flexibility in adjusting the composition of the threshold adjusting material. In other cases, in addition to or alternatively to forming a threshold adjusting semiconductor alloy, a strain-inducing semiconductor alloy may also be provided with enhanced flexibility using the above-described process sequence.
Owner:GLOBALFOUNDRIES US INC

Microstructure device including a metallization structure with self-aligned air gaps formed based on a sacrificial material

In a sophisticated metallization system of a semiconductor device, air gaps may be formed in a self-aligned manner on the basis of a sacrificial material, such as a carbon material, which is deposited after the patterning of a dielectric material for forming therein a via opening. Consequently, superior process conditions during the patterning of the via opening and the sacrificial material in combination with a high degree of flexibility in selecting appropriate materials for the dielectric layer and the sacrificial layer may provide superior uniformity and device characteristics.
Owner:GLOBALFOUNDRIES INC

Wire bonding of aluminum-free metallization layers by surface conditioning

In sophisticated semiconductor devices including copper-based metallization systems, a substantially aluminum-free bump structure in device regions and a substantially aluminum-free wire bond structure in test regions may be formed on the basis of a manufacturing process resulting in identical final dielectric layer stacks in these device areas. Moreover, reliable wire bond connections may be obtained by providing a protection layer, such as an oxide layer, after exposing the respective contact metal, such as copper, nickel and the like, thereby providing highly uniform process conditions during the subsequent wire bonding process. The number of process steps may be reduced by making a decision as to whether a substrate is to become a product substrate or test substrate for estimating the reliability of actual semiconductor devices. For example, nickel contact elements may be formed above copper-based contact areas wherein the nickel may provide a base for wire bonding or forming a bump material thereon.
Owner:GLOBALFOUNDRIES INC

Fluid control device and method of making it

Disclosed is a rigid annular valve structure comprised of individual green state discs having partial or complete passages formed therein. The series of green state discs are assembled in an axially aligned stack such that the partial passages of adjacent ones of the green state discs cooperate to collectively define a plurality of substantially radial device passageways for fluid flowing therethrough. The disc passages are formed in the discs prior to the assembly into the stack. The assembled green state discs are heated as a unit in order to simultaneously harden the individual green state discs and to fuse the individual green state discs together to form the rigid annular valve structure. After heating, the rigid annular valve structure may be machined to define interior and exterior peripheries and end faces such that the rigid annular valve structure is suitable for use in a valve assembly.
Owner:CONTROL COMPONENTS INC

Co-production technique of needle coke, mesocarbon microbeads and high-quality asphalt

The invention relates to a co-production technique of needle coke, mesocarbon microbeads and high-quality asphalt; heavy phase asphalt generated by raw material asphalt pre-treatment and raw material asphalt are mixed to produce mesocarbon microbeads, the byproduct asphalt of the production of misocarbon microbeads and the refined asphalt obtained by the raw material asphalt pre-treatment are mixed as a needle coke raw material; the technique comprises the steps of raw material asphalt pre-treatment, polymerization, polymerization product separating and drying, byproduct asphalt processing, coking and sintering. Compared with the prior art, the technique related by the invention has the following beneficial effects: (1) the coal tar asphalt processing degree is high, the cost is low, the varieties are diversified, the added value of the product is high, and the maximal economic benefit is realized; (2) the waste discharge is avoided during the whole production process, and the optimal environmental benefit is realized; (3) the process is flexible, the operation is simple, and the high-efficiency combination of needle coke, mesocarbon microbeads and high-quality asphalt is realized; and (4) the product index is flexible and adjustable, so as to adapt to market variations in time and improve the market risk resisting capability of an enterprise.
Owner:SINOSTEEL ANSHAN RES INST OF THERMO ENERGY CO LTD

Photocurable adhesive film for organic electronic device seal, organic electronic device, and method for sealing same

Provided are a photocurable pressure-sensitive adhesive composition including an acrylic polymer, an epoxy resin, and a cationic photopolymerization initiator, an organic electronic device having an encapsulant including a photocured product of the composition using a curable pressure-sensitive adhesive film which is a film-state product including the composition, and a method for manufacturing an organic electronic device using the curable pressure-sensitive adhesive film. Particularly, due to the method including laminating a photocurable pressure-sensitive adhesive film including a curable pressure-sensitive adhesive layer including an acrylic polymer, an epoxy resin, and a cationic photopolymerization initiator to an top substrate, and radiating light to an entire surface of the curable pressure-sensitive adhesive layer to perform photocuring, and laminating the photocured curable pressure-sensitive adhesive layer to a bottom substrate on which an organic light emitting element is formed to cover an entire surface of the organic light emitting element, mechanical strength and a simple process caused by photocuring to the organic light emitting element without direct light irradiation may be achieved, and a lifespan of the element may be increased.
Owner:LG CHEM LTD

Solar rural domestic sewage treating device and technique thereof

The invention discloses a solar rural domestic sewage treating device and a technique thereof. The solar rural domestic sewage treating device comprises a sewage anaerobe treating tank, a facultativeaerobe treating tank, a solar aeration system and a sludge return system, wherein the solar aeration system consists of a solar panel, a storage battery, an aeration machine and an aeration pipe. Thesewage to be treated automatically flows into the anaerobe treating tank hung with fillers from a water inlet, then is discharged after being treated, then reflows into the facultative aerobe treatingtank equipped with the solar aeration pipe, is discharged after being treated, is precipitated by a secondary precipitation tank and then is discharged. The solar panel collects and converts solar energy into electric energy which is stored in the storage battery, and drives the aeration machine to aerate for the facultative aerobe treating tank by the storage battery; and simultaneously, a sludge return pump of the secondary precipitation tank provides energy by the storage battery and carries out sludge returning. Therefore, the invention not only effectively utilizes natural energies, butalso reduces operating cost, improves the degree of the rural domestic sewage treatment and provides a novel rural domestic sewage treating technique.
Owner:ZHEJIANG UNIV +1

Method for microwave pyrolysis treatment of oil sludge

The invention discloses a method for microwave pyrolysis treatment of oil sludge. The method adopts microwave pyrolysis to treat the oil sludge and has the characteristics of simple equipment operation and high oil sludge treatment degree. The method comprises the steps of (1) pretreating the oil sludge through dehydration to remove mechanical impurities, preheating, and then delivering the oil sludge into a pyrolysis reactor provided with external microwave radiation; (2) performing thermal conversion on the input material entering the pyrolysis reactor in the reactor, wherein the reaction temperature is controlled to be 400-500 DEG C, the reaction time is controlled to be 10-30min, the microwave radiation frequency is 2450MHz, and the power is 0-750W and is continuously adjustable; and (3) introducing pyrolytic reaction gas into a three-phase separator, recycling the gas phase component at the upper part, discharging the oily sewage at the bottom into a sewage treatment system, recycling oil and delivering the oil into a storage tank for storage. The temperature preheated in a heating furnace is 300-350 DEG C. The method disclosed by the invention is low in coke yield, high in reliability and capable of realizing clean production.
Owner:LIAONING UNIVERSITY OF PETROLEUM AND CHEMICAL TECHNOLOGY

Alloyed hot-dip galvanized steel sheet and manufacturing method therefor

Disclosed is an alloyed hot-dip galvanized steel sheet provided with: a steel sheet; an alloyed hot-dip galvanization layer that is formed on at least one surface of the steel sheet and contains between 0.05% and 0.5% aluminum and between 6% and 12% iron, by mass, with the remainder comprising zinc and unavoidable impurities; and a magnesium / zinc / phosphorus complex oxide layer that is formed on the surface of the alloyed hot-dip galvanization layer and contains between 0.1 mg / m2 and 100 mg / m2 magnesium, between 1 mg / m2 and 100 mg / m2 phosphorus, and zinc. The ratio between the amount of phosphorus and the amount of magnesium in the complex oxide layer is between 0.3 and 50. At the interface between the alloyed hot-dip galvanization layer and the complex oxide layer (5), the alloyed hot-dip galvanization layer has a flat region having an area ratio between 10% and 70% and a roughened-surface region that is closer to the steel sheet than the flat region is. The magnesium / zinc / phosphorus complex oxide layer contains an amorphous compound.
Owner:NIPPON STEEL CORP

Rubbish penetrating fluid treatment method

The invention provides a rubbish penetrating fluid treatment method. The rubbish penetrating fluid treatment method comprises flocculent settling treatment, Fenton oxidation treatment and activated carbon adsorption treatment which are performed in sequence. First in the flocculent settling treatment step, by combined use of a decolorizing agent, PAC and PAM, the very good decolorizing effect is achieved, the chromaticity can be reduced by at least two orders of magnitude, and CODs, BODs and heavy metal ions such as arsenite, lead and mercury in water can be removed effectively. Next, organic pollutants difficult to degrade can be removed more effectively through Fenton oxidation under the acidic conditions. Finally, adsorption is performed by utilizing activated carbon. Therefore, the rubbish penetrating fluid treatment method is low in cost, high in effect and simple to operate and saves manpower and material resources. Moreover, the treatment degree is high, the effect is stable, the penetrating fluid chromaticity, CODs, BODs, the heavy metal content and ammonia nitrogen of rubbish treated through the method reach the emission standard.
Owner:NANJING RUNZHONG BIOTECH

Method for processing cooked notoginseng

InactiveCN101502548AHigh degree of processingThe degree of processing maturity is higher than that of excellentBlood disorderPlant ingredientsPANAX NOTOGINSENG ROOTHigh pressure
The invention relates to a concocting method of cooked panax notoginseng, comprising the following steps of taking raw panax notoginseng or thoroughly moistened panax notoginseng; or raw panax notoginseng pieces or thoroughly moistened panax notoginseng pieces; or panax notoginseng powder; arranging in a flowing steam kettle for steaming for 1-15 hours at high temperature of 106-125 DEG C and high pressure of 0.03-0.14MPa, taking out till the interior and the exterior are dark brown and drying. The cooked panax notoginseng concocted by the method has stable quality, long storage time, significant blood enrichment effect and improves medicinal value of the panax notoginseng.
Owner:广西壮族自治区药物研究所有限公司

Device and method for processing domestic wastewater by means of A2O and submerged biological filter

ActiveCN103482819AChange loadChanges in shock load resistanceMultistage water/sewage treatmentSludgeBiological filter
The invention discloses a device and method for processing domestic wastewater by means of an A2O and submerged biological filter, and belongs to the field of wastewater processing. A water inlet pipe and a sludge return pipe of the device are respectively connected to the bottom of an A2O reaction basin anaerobic zone. A nitration liquid storage basin is connected with a second lattice chamber of a reaction basin, namely a first lattice of the anaerobic zone, through a nitration liquid return pipe. An A2O reaction basin aerobic zone is connected with a middle sedimentation basin through a first water outlet pipe. The middle sedimentation basin is connected with a first lattice chamber of the submerged biological filter through a water inlet pipe of the submerged biological filter. The submerged biological filter is connected with a secondary sedimentation basin through a second water outlet pipe. The secondary sedimentation basin is connected with the nitration liquid storage basin through a third water outlet pipe. The method comprises the steps of achieving wastewater denitrification nitrogen and phosphorus removal to remove organic matter through the A2O reaction basin, conducting ammonia nitrogen oxidation through the biological filter, providing an electronic acceptor for a denitrification nitrogen and phosphorus removal reaction in the reaction basin, and completing efficient removal of the organic matter, nitrogen and phosphorus. The device and method for processing the domestic wastewater by means of the A2O submerged biological filter have the advantages of having the efficient, energy-saving and stable nitrogen and phosphorus removal effect and reducing sludge.
Owner:BEIJING UNIV OF TECH

Fermented vegetable and fruit juice

The invention discloses a fermented vegetable and fruit juice, and belongs to the field of food processing. The invention adopts Rosa roxburghii and kiwi rich in vitamin C, and gold cherry fruit and honeysuckle with medicinal values, cabbage juice, celery juice and broccoli juice for fermentation to obtain a fruit and vegetable juice with high nutritional value. The fermented juice can be prepared into a fermented fruit and vegetable juice beverage with sweet and sour taste, strong aroma and rich nutrition.
Owner:贵州圣心生物技术有限公司

Speed control method for numerical control multilayer leather cutting machine tool

The invention discloses a speed control method for a numerical control multilayer leather cutting machine tool, comprising the following steps of: (1) setting the numerical control multilayer leather cutting process including a main motion and a feed motion; and for the speed control on the feed motion, figuring out the acceleration Ja of the machine tool and deducting an acceleration formula and a speed calculation formula according to performance indexes of the feed maximum acceleration amax and the feeding maximum speed Vmax; (2) judging whether a leather material to be processed is a standard leather material or not and correcting; (3) judging whether the layer number of leather to be cut is a single layer or not and correcting; and (4) judging whether the current cutting track is a straight line or not: correcting the speed according to the radius Rx of a current path to obtain V3 and linearly calculating according to the speed in a path curvature radius interval to obtain the cutting speed of any curvature radius. The speed control on the tangential accompany motion can be realized. The speed control method is suitable for multilayer leather processing occasions and has high processing speed and efficiency optimizing degree; and the adjust error is reduced.
Owner:ZHEJIANG UNIV OF TECH

Method for treatment of oil sludge by microwave catalytic pyrolysis

The invention discloses a method for treatment of oil sludge by microwave catalytic pyrolysis. The method consists of: leaving preheated oil sludge and a catalyst to enter a pyrolysis reactor equipped with external microwave radiation together; conducting thermal conversion on the oil sludge and the catalyst in the reactor, making pyrolysis gas enter a three-phase separator, recycling the upper gas phase component, discharging the bottom oily sewage into a sewage treatment system, and delivering the recovered oil into a storage tank for storage. According to the invention, by adding a proper amount of the catalyst with a "hydrogen transfer" function into the oil sludge subjected to microwave pyrolysis, hydrogen in the light oil component of the oil sludge can be transferred out to stabilize free radicals generated by the reaction, so that the oil sludge can undergo a complete and effective pyrolysis treatment. Thus, the method provided in the invention can achieve a maximal liquid phase yield and a minimal coke yield.
Owner:CHINA PETROLEUM & CHEM CORP +1

Preparation method of artificial graphite material special for lithium ion battery negative electrode

The invention relates to a preparation method of an artificial graphite material special for a lithium ion battery negative electrode. The preparation method comprises the following steps of: preparing polymerized asphalt from raw material asphalt through thermal polymerization reaction; mixing and separating the polymerized asphalt and a solvent I to obtain light-phase oil and heavy-phase oil; blending the heavy-phase oil with the solvent I, and carrying out thermal separation treatment to obtain a soluble component and an insoluble component; mixing the insoluble component with a solvent II,carrying out filter pressing to obtain a filter cake and a filtrate, mixing the filtrate with the soluble component, and performing distilling to recover the solvent I and the solvent II to obtain rectified asphalt; and performing directional coking reaction on the rectified asphalt to obtain wide-area mesophase green coke, and performing calcination and high-temperature graphitization treatmenton the crushed green coke particles to obtain the artificial graphite material special for the lithium ion battery negative electrode. The technical difficulty that high capacity and high rate capability of the lithium ion battery negative electrode material cannot be achieved at the same time is broken through, and meanwhile the problems that a traditional lithium ion battery negative electrode is complex in production process and high in price are solved.
Owner:鞍钢化学科技有限公司

Composite processing technology of fine injection type hole

A combined technology for machining the shaped superfine spray orifices includes fine punching with the group of punching heads having different tip shapes to form the reverse conic cavities, and electrospark machining on their back to form the shaped superfine orifices.
Owner:TSINGHUA UNIV

Microstructure device including a metallization structure with self-aligned air gaps formed based on a sacrificial material

In a sophisticated metallization system of a semiconductor device, air gaps may be formed in a self-aligned manner on the basis of a sacrificial material, such as a carbon material, which is deposited after the patterning of a dielectric material for forming therein a via opening. Consequently, superior process conditions during the patterning of the via opening and the sacrificial material in combination with a high degree of flexibility in selecting appropriate materials for the dielectric layer and the sacrificial layer may provide superior uniformity and device characteristics.
Owner:GLOBALFOUNDRIES INC

Semiconductor element formed in a crystalline substrate material and comprising an embedded in situ doped semiconductor material

The PN junction of a substrate diode in a sophisticated SOI device may be formed on the basis of an embedded in situ doped semiconductor material, thereby providing superior diode characteristics. For example, a silicon / germanium semiconductor material may be formed in a cavity in the substrate material, wherein the size and shape of the cavity may be selected so as to avoid undue interaction with metal silicide material.
Owner:TAIWAN SEMICON MFG CO LTD

Waste water treating systems

A sewage treating system is composed of depositing pool, the floatation equipment consisting of tank body, supporting frame and electrode set which comprises base, insoluable plate anode and plate cathode made of stainless steel or graphite, and the aerating biological filter pool consisting pool body, filter layer, aerating pipe and active haydites in the pool. Its advantages are the integration of electrochemical treating, filter and biodegradation, small size and high effect.
Owner:上海纪明生物科技有限公司

Method for preparing mesocarbon microbeads by cyclic pyrocondensation polymerization of byproduct asphalt

The invention relates to a method for preparing mesocarbon microbeads by cyclic pyrocondensation polymerization of a byproduct asphalt. The method comprises the steps: mixing coal-based asphalt, the byproduct asphalt and a first solvent to obtain a mixed material; heating the mixed material to a reaction temperature for a pyrocondensation polymerization reaction to obtain polycondensed asphalt containing mesocarbon microbeads; extracting and separating the polycondensed asphalt in a second solvent to obtain a solid-phase component and a liquid-phase component; drying the solid-phase componentto obtain the mesocarbon microbeads; and distilling the liquid-phase component to obtain the byproduct asphalt, and recovering the second solvent. The preparation method provided by the invention is simple in process, raw materials are not needed to be pretreated, a catalyst or a nucleating agent is not needed to be additionally added, and meanwhile, the byproduct asphalt generated by pyrocondensation polymerization can be recycled to take part in the pyrocondensation polymerization reaction again, so that the yield is high, and the prepared mesocarbon microbeads are relatively narrow in particle size distribution, good in sphericity and smooth in bead surfaces.
Owner:CCTEG CHINA COAL RES INST

Method for forming a self-aligned nitrogen-containing copper silicide capping layer in a microstructure device

By forming a copper / silicon / nitrogen alloy in a surface portion of a copper-containing region on the basis of a precursor layer, highly controllable and reliable process conditions may be established. The precursor layer may be formed on the basis of a liquid precursor solution, which may exhibit a substantially self-aligned and self-limiting deposition behavior.
Owner:TESSERA ADVANCED TECH

Power grid transformer oil safety detection equipment

The invention discloses power grid transformer oil safety detection equipment, which comprises a compensation oil storage tank, an oil change mechanism, a distribution mechanism, a heat treatment mechanism, a carrier gas circulation mechanism, a temperature control mechanism, a waste oil recovery mechanism and a gas detection mechanism. An interlayer is arranged in the middle of a cylinder to forman independent driving chamber located on the lower portion and an independent sampling and supplementing oil chamber located on the upper portion. An electric driving mechanism is installed in the driving chamber, a push rod of the electric driving mechanism extends into the sampling and supplementing oil chamber and is provided with a piston, and the piston divides the sampling and supplementing oil chamber into a lower sampling oil chamber and an upper supplementing oil chamber. After sampled oil of the same batch is divided into a plurality of equal parts, emphasized detection is carriedout on different equal parts. Temperature control mechanisms located in different flat grooves can be arranged differently. The purpose of achieving the maximum detection degree is achieved accordingto the separation performance of different gases. Unimpeded butt joint of sampled oil treatment and a carrier gas channel can be achieved. The operability of fault gas detection is improved, and the detection precision is improved.
Owner:河南展丰工程技术咨询有限公司

Compound deep purification ecological floating bed with external carbon source and purification treatment method thereof

The invention relates to a compound deep purification ecological floating bed with an external carbon source and a purification treatment method thereof. The purification ecological floating bed structurally comprises a floating bed frame, an A bamboo raft, a geogrid, a polystyrene board, a plant, a nylon cable tie, a spherical framework, a gauze element, a starch / PHB (Poly-beta-hydroxybutyrate) blend, a fixing rod, a cuboid-shaped gabion and a B bamboo draft, wherein the A bamboo draft and the B bamboo draft are fixed onto the frame through iron wires; the plant 5 is fixed onto the polystyrene board; the polystyrene board is wrapped with the geogrid; the geogrid is fixed onto the frame through the nylon cable tie; a suspension rope is tied to the lower part of the geogrid; the starch / PHB blend is wrapped with the gauze element; the starch / PHB wrapped with the gauze element is placed into the framework; the framework is fixed onto the fixing rod; and the cuboid-shaped gabion is fixed onto the frame through iron wires. The compound deep purification ecological floating bed with the external carbon source has the advantages that the materials are easily available, cost is low, purification efficiency is high, effects are obvious, and management is convenient.
Owner:HOHAI UNIV

Raw material asphalt for carbon-based new material and production process thereof

The invention relates to a raw material asphalt for a carbon-based new material and a production process thereof. The production process comprises the following steps of: feeding a residual product obtained by removing light oil from raw material oil through a reduced pressure distillation tower into a polymerization reaction kettle, and carrying out pressurized asphalting reaction to obtain polymerized asphalt; settling and separating the polymerized asphalt and a solvent I to obtain aromatic-rich light oil and aromatic-rich heavy oil; mixing and separating the aromatic-rich heavy oil and thesolvent I to obtain a soluble component and an insoluble component; carrying out reduced pressure distillation on the aromatic-rich light oil and the soluble component to obtain light refined asphalt; carrying out hydrogenation reaction on the light refined asphalt and a hydrogen supply reagent to obtain hydrogenated asphalt, and further acquiring refined hydrogenated asphalt; mixing and separating the insoluble component, the solvent I and a solvent II to obtain filtrate and filter residue; and distilling the filtrate under reduced pressure to obtain heavy refined asphalt. The process is used for preparing the high-quality asphalt raw material which is narrow in molecular weight distribution, moderate in molecular weight, highly ordered in molecular arrangement, good in flowability, excellent in aggregation state structure and stable in thermal reaction activity.
Owner:鞍钢化学科技有限公司

Method for forming a self-aligned nitrogen-containing copper silicide capping layer in a microstructure device

By forming a copper / silicon / nitrogen alloy in a surface portion of a copper-containing region on the basis of a precursor layer, highly controllable and reliable process conditions may be established. The precursor layer may be formed on the basis of a liquid precursor solution, which may exhibit a substantially self-aligned and self-limiting deposition behavior.
Owner:TESSERA ADVANCED TECH
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