The invention relates to the technical field of
semiconductor packaging, and particularly discloses a heterogeneous
chip integrated high-temperature packaging structure and a packaging method thereof.The packaging structure comprises two heterogeneous chips, a
ceramic tube shell, a transition piece, a high-temperature solder, a
bonding alloy wire, a bonding aluminum wire and a flat sealing cover plate; the
ceramic tube shell comprises a sealing ring, a key and finger region, a
chip mounting region and a
chip interconnection region, the first transition sheet and the second transition sheet are respectively mounted in the first key and finger region and the chip
interconnection region, and the two heterogeneous chips are respectively mounted in the first chip mounting region and the second chip mounting region. One heterogeneous chip is respectively in
lead bonding with the first transition sheet and the second transition sheet, the other heterogeneous chip is respectively in
lead bonding with the chip
interconnection area and the second key and finger area, and the
ceramic tube shell is welded with the flat sealing cover plate through the sealing ring. According to the invention, the high-temperature reliability of heterogeneous chip integration is guaranteed, the heat dissipation capability of the heterogeneous chip is improved, and the application field of the product is expanded.