The invention discloses real-time monitoring
feedback control equipment for a
crystal furnace and a monitoring method, and relates to the technical field of
crystal growth, a
magnetic levitation positioning gradient heating
assembly forms axial constraint through the up-down symmetrical design of a Z-axis coil and a closed
magnetic circuit of a
magnet yoke, and the vertical position radial constraint of a
crucible can be accurately controlled; the X-axis coil and the Y-axis coil ensure that tiny deviation of the
crucible in the horizontal direction is corrected in real time through
magnetic field force in the left-right direction and the front-back direction, friction or vibration caused by mechanical contact can be avoided, currents of the X-axis coil, the Y-axis coil and the Z-axis coil are independently controlled, three-dimensional space positioning of the
crucible can be achieved, complex track movement can be achieved, and therefore different
process requirements can be met; meanwhile, due to the arrangement of gradient
magnetic field heating, the heating coils on the top layer, the middle layer and the bottom layer can form a
temperature gradient, the
sensor array can capture the infinitesimal displacement of the crucible in milliseconds, and the coil current is dynamically adjusted through a
feedback loop, so that the positioning precision is ensured.