The present application relates to active
vibration isolation control and sensor measurement technical field, specifically to a kind of three-axis ultra-
low frequency feedforward measuring device based on
piezoelectric sensor, including, buffer component is located in frame,
mass block is located on buffer component,
mass block two ends are equipped with connecting piece and limit block, and fixed plate is equipped on limit block, plastic column is inserted into each side wall of
mass block, and plastic column penetrates connecting piece or frame, piezoelectric sensing unit is equipped on plastic column, two piezoelectric sensing units oppositely arranged are a group, the axis of two piezoelectric sensing units in same group coincides, the axis of three groups of piezoelectric sensing units is mutually orthogonal.Structure is compact, integration is high, utilize the quick
response characteristics and low cross-
coupling coefficient of piezoelectric material, effectively reduce the
coupling interference of three-axis
signal, improve the precision and timeliness of vibration
signal acquisition, provide reliable sensing support for feedforward control of
vibration isolation system, applied to precision instrument,
aerospace and other fields of
vibration isolation scene.