The invention provides an oxide film preparation method. The oxide film preparation method comprises the following steps: step 1, mixing oxide powder and graphite powder, putting the mixture in a reaction boat, and putting the reaction boat in a quartz reaction tube; step 2, putting a cleaned and blow-dried substrate on a substrate support and putting the substrate support in the quartz reaction tube; step3, respectively feeding inert gas into the quartz reaction tube and the reaction kettle boat; step 4. heating the quartz reaction tube; step 5, adjusting the operating temperatures of the reaction boat and the substrate, and adjusting the operating pressure in the quartz reaction tube, feeding oxygen-containing gas into the quartz reaction tube, setting growth time, and depositing an oxide film on the substrate, thus completing oxide film preparation. The oxide film preparation method expands the preparation range of the oxide films and can be used for preparing metallic oxide films and non-metallic oxide films, particularly for certain oxide films difficult to prepare by using other methods at present.