The invention relates to the field of surface acoustic wave device manufacturing, and specifically relates to a structure of a flexible surface acoustic wave device resistant to high temperature and a manufacturing method thereof. The structure sequentially comprises, from bottom to top, a bottom protective layer, a flexible alloy substrate, a buffer layer, a piezoelectric film, an interdigital electrode, and a top protective layer. The flexible alloy substrate is made of high-temperature flexible alloy strips. The buffer layer and the bottom protective layer are amorphous oxide films. The piezoelectric film is an aluminum nitride film. The interdigital electrode is made of gold. The top protective layer is an aluminum nitride film. The method comprises the steps of preprocessing the flexible alloy substrate, preparing the amorphous oxide films by a chemical solution dip-coating method, preparing the piezoelectric film and the interdigital electrode, and finally, preparing the top protective layer. The flexible surface acoustic wave device has the advantages of being resistant to high temperature, good in flexible characteristic, light, capable of working in a complex curved surface environment, and low in cost.