The invention provides a reduction furnace
bell jar inner wall spraying device and spraying method and a reduction furnace, and relates to the technical field of
polycrystalline silicon equipment. Thespraying device comprises a
bell jar, a rotating part, a sealing part, a vacuumizing part, an exhaust part and a cold gas power spraying part; and after a
closed space is formed in the
bell jar through a sealing part, the interior of the bell
jar is in a high-temperature protective gas
atmosphere through the vacuumizing part, the cold gas power spraying part and the exhaust part, then the cold gas power spraying part is adopted to spray
powder to the inner wall of the bell
jar to form a
coating on the inner wall of the bell
jar, the interior of the bell jar is in the high-temperature protective gas
atmosphere before spraying, oxidation of the
coating in the spraying process can be avoided, and the intrinsic performance of a
coating material can be reserved to the maximum extent; and meanwhile, the inner wall of the bell jar is preheated by using high-temperature protective gas, so that the coating with high
bonding strength is obtained under a relatively low spraying condition. The invention further provides the reduction furnace bell jar inner wall spraying method.