The application discloses a kind of self-adaptive
cutting processes for preventing
silicon rod hidden crack, including the following steps:
silicon rod pretreatment,
cutting equipment debugging and initialization, multidimensional real-time monitoring, parameter adaptive adjustment,
cutting process closed-
loop control, cutting completion and post-
processing.The application detects the whole dimension through the
silicon rod pretreatment stage, multidimensional real-time monitoring the key parameters such as
internal stress and cutting line state of silicon rod, dynamically adjusts the cutting parameters through
adaptive algorithm, realizes the accurate control of cutting stress, avoids the hidden crack caused by excessive stress and parameter mismatch from the root;According to the differences of silicon rod characteristics, the state changes in the cutting process, automatically adjust the cutting parameters, with strong adaptive ability, wide adaptability, improve the cutting efficiency and silicon rod cutting yield;Through the filing of cutting data and the construction of
database, realize the
continuous optimization of process, with high degree of
automation, reduce labor cost.