The invention discloses a process for improving
oxygen ring defects, and relates to the field of Czochralski
single crystal manufacturing, the process comprises the following steps: S1, preparing a
single crystal furnace: the
single crystal furnace comprises a
carbon felt, a
quartz crucible, a
graphite support, a solution, a heater, a
heat shield, a
crystal bar, a furnace body shell and an
argon pipe; s2,
crystal pulling treatment; s3, setting different liquid opening distances to produce
crystal bars for small-batch battery
verification, and monitoring the OSF generation condition after battery topcon high-temperature
diffusion heat treatment; and S4, carrying out an
oxygen precipitation heat treatment process and a Cu
diffusion process on the material for
impurity removal. According to the technology for improving the
oxygen ring defect, the position of a
heat shield is adjusted,
monocrystalline silicon oxidation induced staggered rings are reduced, on the basis of the forming principle of the defect, the V / G value of a
solid-
liquid interface is controlled to be larger than the critical value of 0.13 mm < 2 > min <-1 > k <-1 > in the production process, and reduction of thermal stress is controlled; higher vacancy concentration can be obtained,
dislocation can be reduced, and OSF-ring generation can be avoided.