The invention belongs to the technical field of charge-
discharge control devices and methods for de-foaming mechanisms, and discloses a de-foaming and recycling
system and process. A new liquid material enters a stirring tank under the action of a
vacuum pump and a suction
pipe and is stirred at
constant speed and constant temperature; the stirred liquid material is fed into a first vacuum de-foaming tank through a
metal pipeline under the action of vacuum
suction force and is de-foamed primarily; the liquid material which is de-foamed primarily is fed into a second
cascade type de-foaming tank through a
metal pipeline under the action of the vacuum
suction force and is de-foamed secondarily; the liquid material which is de-foamed secondarily is fed into a third vacuum de-foaming tank through a
metal pipeline under the action of the vacuum
suction force and is de-foamed for the third time; the liquid material which is de-foamed for the third time; enters a
storage tank under the action of the vacuum suction force and is directly subjected to optical disk spin-
coating operation; after the optical disk spin-
coating operation is performed, the remaining liquid material flows into a recycling tank, flows into the stirring tank under the action of the vacuum suction force, and is mixed with a new liquid material for
continuous use so as to be recycled. The
system and the process are low in cost, easy to operate and high in de-foaming efficiency, and cannot affect the physical and chemical performances of the de-foamed liquid material; the liquid material can be continuously fed, de-foamed, used and recycled.