The application relates to the technical field of automatic exhaust pressure regulation of
semiconductor equipment, in particular to an automatic exhaust pressure regulation device which is provided with a driving execution module and a pressure regulating valve module, the pressure regulating valve module comprises a base bottom plate, a blade fixing plate, an iris blade and a blade guide plate, the iris blade is connected with the blade fixing plate and the blade guide plate through a rotating sliding groove structure, both ends of all the sliding grooves in the rotating sliding groove structure are provided with openings, foreign matters can be discharged from the openings along the iris blade, the accumulation of foreign matters in the sliding grooves is avoided, the blade is prevented from being blocked, and the operation reliability of the device in an
impurity-containing gas environment is improved; through the setting of a blade guide plate and blade fixing plate composite constraint structure, the rotating movement of the driving execution module is converted into the accurate
radial displacement of the iris blade, the
diameter of an exhaust passage is continuously adjustable, the blade opening degree has small synchronous error, there is no
airflow step
mutation in the opening and closing process, and the exhaust flow control precision is ensured.