The utility model belongs to the field of
semiconductor power device manufacturing, and particularly relates to a GaN-based HEMT device with an inclined field plate structure, which comprises a substrate layer, a buffer layer connected above the substrate layer, an AlGaN
barrier layer connected above the buffer layer, a GaN cap layer connected above the AlGaN
barrier layer, and a GaN layer connected above the GaN cap layer. The left side and the right side of the GaN cap layer are oppositely connected with a source
electrode and a drain
electrode, the top of the GaN cap layer is connected with SiN
passivation, the top of the GaN cap layer is connected with a grid
electrode, and Schottky contact is formed between the grid electrode and the GaN cap layer; a field plate is introduced into the grid electrode. By introducing the field plate structure,
electric field lines at the edge of the grid electrode are dispersed, and the
electric field intensity at the edge of the grid electrode is effectively reduced, so that the
electric field distribution in a depletion layer is more uniform, the possibility that electrons tunnel to a
surface trap is reduced, the formation of a virtual grid effect is further hindered, and the performance of the device is improved. And the current collapse phenomenon of the device is effectively reduced.