1results about How to "Control deposition rate" patented technology

The utility model relates to chemical vapor deposition technical field especially relates to a tray assembly for vapor deposition growth chamber, including shell, still include: air inlet portion, air inlet portion installs on the base of shell, transmission portion, transmission portion installs on air inlet portion and is located the inside of shell, through drive portion can drive hollow column rotation, and then through the gas injection hole can even gas injection in the shell, improved the uniformity of gas distribution in the shell, and then improved the uniformity of the film layer structure formed on the substrate, and rely on transmission portion can make the substrate autorotation, and then make the gas column swept in the gas injection hole in the substrate each surface area, through the uniform rotation of hollow column, can make the substrate keep uniform rotation, and then can make the gas column of gas injection hole whole and the contact time of each area of substrate surface, with it improved the uniformity of the film structure formed on the substrate surface, improved the film quality.