The utility model belongs to the technical field of
environmental protection, and particularly discloses a CVD
sintering furnace
acid gas tail gas treatment device which comprises a pipeline connected with the exhaust end of a
sintering furnace, and a first filtering
assembly, a cleaning
assembly and a second filtering
assembly are sequentially arranged in the length direction of the pipeline. The cleaning assembly comprises an oil washing part and a
water washing part; the oil washing part comprises a
mixing chamber and a separation chamber, the
mixing chamber is used for mixing gas and oil, and the separation chamber is used for separating the gas and the oil; the washing part comprises a
spray tower which is communicated with the pipeline; the
spray tower is provided with a spray head; the spray header is used for spraying alkali liquor into the
spray tower; the spray
tower is provided with a pH sensor which is used for detecting the pH value of the alkali liquor. According to the utility model, particle
filtration and multi-stage purification are realized, the safety of the device can be effectively improved, and the problems of easiness in
corrosion, low protection effect and low treatment efficiency of equipment in the prior art are solved.