A manufacturing method of
a diamond like carbon vibrating diaphragm of the present invention comprises a step of placing a base material in the air, wherein the base material is a
high polymer material. A step of depositing the
diamond like carbon vibrating diaphragm comprises on a temperature condition of less than 90 DEG C, importing a carbon-containing gas from one end of an
atmospheric pressure plasma chemical vapor deposition device, and providing a
voltage more than 5 kV and less than 10 kV to ionize the carbon-containing gas, importing a main gas from the other end of the
atmospheric pressure plasma chemical vapor deposition device, bringing out the ionized carbon-containing gas out of the
atmospheric pressure plasma chemical vapor deposition device by the main gas and depositing on the surface of the base material to form the
diamond like carbon vibrating diaphragm. A step of forming the
diamond like carbon vibrating diaphragm comprises
cutting the
diamond like carbon vibrating diaphragm having the needed
diameter from the
diamond like carbon vibrating diaphragm, forming the
diamond like carbon vibrating diaphragm having the needed shape by a compressing technology; or compressing on the diamond like carbon vibrating diaphragm by the compressing technology to form the diamond like carbon vibrating diaphragm having the needed shape and
diameter, and
cutting the diamond like carbon vibrating diaphragm. Compared with the conventional manufacturing method of the
plasma enhanced chemical vapor deposition and the
physical vapor deposition, the manufacturing method of the diamond like carbon vibrating diaphragm of the present invention can deposit the diamond like carbon vibrating diaphragm in the atmospheric pressure and low temperature environments without needing to setting a vacuum cavity and a vacuum device, and enables the processes to be simplified. Moreover, in the low temperature environment, the diaphragm break caused by the high temperature or the diaphragm wrinkling caused by the
thermal deformation can be avoided, and the formed diamond like carbon vibrating diaphragm is more flat.