The application relates to a preparation method of pentamethylcyclopentadienyl
tris(methoxy)
titanium, which comprises the following steps: S1, carrying out a heating reaction of Ti(NR 1 R 2 )4 and
pentamethylcyclopentadiene in the presence of
tris(pentafluorophenyl)
borane and a
solvent; S2, after the reaction in the step S1 is completed,
methanol is added to carry out an alcoholysis reaction, after the reaction is completed, the
solvent is removed, and the pentamethylcyclopentadienyl
tris(methoxy)
titanium is obtained. The application takes
titanium tetrakis(dimethylamino) compound and
pentamethylcyclopentadiene as starting materials, and under the
catalysis of a specific and appropriate Lewis acid catalyst tris(pentafluorophenyl)
borane, the pentamethylcyclopentadienyl tris(methoxy) titanium can be efficiently reacted to generate pentamethylcyclopentadienyl tris(methoxy) titanium, and the yield is as high as 95%. The method is suitable for industrial large-scale production, and has the advantages of easy
raw material, simple operation and good atomic economy; and the whole process does not involve any
chlorine-containing
reagent, so the deterioration of the
chlorine-containing impurities on the electrical properties of the
atomic layer deposition film is avoided from the source.