The invention provides a low-
nickel system in-situ complexation electronic-grade
iminodiacetic acid refining
system, and relates to the technical field of
iminodiacetic acid preparation, the refining
system integrates in-situ induced complexation,
supergravity precipitation and separation, a nanometer gradient screening unit and a developing line cleaning
coupling module, a
nickel ion solvation layer is stripped through a high-frequency
cavitation generator, and a high-purity product is obtained. A
nickel complexing precursor is generated through induction of a functionalized filler layer, a horizontal asymmetric
rotating drum is used for generating a super-gravity field not lower than 3000g to achieve forced liquid-
solid separation, and a multi-layer
ceramic composite membrane with the
pore diameter gradually decreased from 1 micron to 5 nm is matched with a self-assembled monomolecular membrane to conduct physical interception and
chemical adsorption dual refining. The system is assisted by on-line
quality monitoring and self-adaptive
reflux logic, so that the nickel
ion concentration of the produced liquid is stably maintained at an extremely low level of less than or equal to 10ppb, the problems of low reaction activity of nickel in an extremely dilute solution, difficulty in separation of colloidal impurities,
precipitation of equipment
metal and the like are effectively solved, and a purity guarantee is provided for an advanced
semiconductor process.