The invention provides a multilayer film-coated member which has both sufficient
heat resistance and sufficient abrasion resistance and has excellent
coating film
adhesion strength so that it can sufficiently exhibit the capability of the
coating film even in
cutting environments that may be more and more severe, and provides a method for producing it. The multilayer film-coated member is fabricated by
coating the surface of a substrate with at least two hard coating films having different compositions, wherein the first composition hard film of the outermost layer of the hard coating films represented by SiaBbNcCdOe with a+b+c+d+e=1, 0.1≦a≦0.5, 0.01≦b≦0.2, 0.05≦c≦0.6, 0.1≦d≦0.7 and 0<e≦0.2, the second composition hard coating film of the lower layer below the first composition hard coating film is a hard film having at least two selected from Al, Ti, Cr, Ni, Ce, Mg, Nb, W, Si, V, Zr and Mo and N and at least one selected from B, C, and S and the
oxygen content of the film within a range of at least 25 nm from the interface of the first composition hard coating film that is in contact with the underlying layer toward the surface of the first composition hard coating film is limited to a range of less than 3.5 atm. %. The method for producing the multilayer film-coated member comprises forming the first composition hard coating film under
temperature control to keep the substrate temperature not higher than 400° C., and comprises forming it, after the coating
target surface is cleaned through preliminary discharging, at a
sputtering output power of less than 2500 W up to a thickness of at least 5 nm from the interface to the underlying layer.