5results about How to "Good structural consistency" patented technology

This invention discloses a method for manufacturing a trench gate semiconductor power device, comprising: forming a first hard mask layer on a first epitaxial layer; patterning and etching the first hard mask layer to open the formation region of the gate trench; etching the first epitaxial layer to form the gate trench; removing the first hard mask layer and then performing a first thermal oxidation process to form a first field oxide layer on the inner surface and outer surface of the gate trench; performing a first CVD growth process to form a second field oxide layer, and stacking the first and second field oxide layers to form a third field oxide layer; performing a first CMP process to remove the third field oxide layer outside the gate trench; forming a first polysilicon layer to completely fill the gate trench and extend it outside the gate trench; and performing a second CMP process to planarize the first polysilicon layer. This invention can simultaneously improve the structural consistency of the gate trench region and the plateau region, and can comprehensively improve the device performance and yield.

The invention discloses a flexible pressure sensor of a rigidity gradient micro-cone array and a manufacturing method thereof, and belongs to the technical field of flexible sensor structure design and manufacturing. The sensor comprises an upper packaging layer, an upper electrode layer, a sensitive layer, a lower electrode layer and a lower packaging layer which are sequentially stacked from top to bottom, the upper end of the sensitive layer is electrically connected with the upper electrode layer, and the lower end of the sensitive layer is electrically connected with the lower electrode layer; the sensitive layer is of an elastomer micro-cone array structure, and at least two layers of elastomer laminated layers with different elastic moduli are constructed on a single micro-cone in the height direction, so that the micro-cone forms an axial rigidity gradient from the top to the bottom; the surface of the sensitive layer is coated with a conductive layer; the conductive layer is used for generating electrical parameter change along with the change of the contact state of the micro cone and the upper electrode layer under the action of pressure so as to realize pressure detection; the sensor can realize high-response and wide-range collaborative improvement, and is suitable for wearable, man-machine interaction, soft robot touch and other scenes.

The invention belongs to the technical field of preparation of inorganic non-metallic materials, and particularly relates to a preparation method of high-purity opaque quartz glass. The method comprises the following steps: by taking high-purity silica sol with impurity content of less than 1ppm as a raw material, compounding silica sol with various particle sizes in proportion, concentrating under reduced pressure until the content of silicon dioxide is 40-60%, adding an acrylamide gel enhancing system into the compounded sol, controlling the temperature to gelatinize the compounded sol, and preserving heat to improve the gel strength; and drying the wet gel at a low temperature of 60-80 DEG C and a relative humidity of 80-95% until the moisture content is less than 5%, then carrying out normal pressure dehydration, organic matter removal and presintering treatment on the dried gel blank, placing the presintered blank in a graphite container, and melting and preserving heat at 1400-1650 DEG C under the protection of nitrogen for 2-8 hours to obtain the non-quartz glass. And the pore size and density can be controlled by regulating and controlling the melting temperature and the heat preservation time. The total impurity content of the quartz glass prepared by the method is less than 5ppm, the structure is uniform, the density can be adjusted in a range of 1.8-2.1 g / cm < 3 >, and the quartz glass has good shading and heat-insulating properties.

This invention discloses a differential centrifugation method for separating α-Al₂O₃ nanoparticles based on morphological response differences, comprising the following steps: S1: Dispersing α-Al₂O₃ nanoparticles at a concentration of 0.55 wt% in anhydrous ethanol, and continuously dispersing the particles using an ultrasonic device; S2: Centrifuging the resulting suspension at 10,000–15,000 rpm, discarding the lower precipitate, and retaining the supernatant; S3: Dispersing the supernatant again using ultrasonication under the same conditions as in step S1; S4: Centrifuging the dispersed system at 4,000–7,000 rpm at a medium speed, and collecting the lower precipitate; S5: Repeating the combined process of steps S2–S4 2–3 times, merging all precipitates obtained in the medium-speed centrifugation stage, and obtaining the target α-Al₂O₃ nanoparticles after drying. The particles obtained by this method exhibit higher polishing rates, lower surface roughness, and lower defect density in CMP, which improves density and grain uniformity in ceramic sintering. At the same time, the method has a clear process, adjustable parameters, and strong equipment versatility, and has significant potential for industrial scale-up and engineering applications.

The invention relates to the technical field of high-nickel precursor materials, in particular to a high-nickel precursor material for a lithium ion battery and a preparation method of the high-nickel precursor material. The method comprises the following steps: (1) preparing a mixed salt solution from soluble nickel salt and soluble cobalt salt; (2) under a protective atmosphere, introducing the mixed salt solution, a doping additive, a precipitator and a complexing agent into a reaction kettle, carrying out constant-temperature co-precipitation, stopping introducing the mixed salt solution and the doping additive after a preset particle size is reached, introducing a coating additive, and carrying out a reaction to form a coating layer, so as to obtain qualified slurry; and the spherical high-nickel precursor material which can bear high pressure and is not easy to collapse and crack is obtained after post-treatment. Primary particles of the precursor can be refined through the tungsten doping agent, a looser and porous precursor can be formed by combining the tungsten doping agent with the double complexing agent, and meanwhile the precursor has better pressure resistance and cracking resistance under the combined action of the aluminum coating layer and the loose and porous interior.