The invention discloses a scanning probe
microscope imaging
test structure for air sensitive materials, which comprises an outer cavity, a sealing cover, a sealing medium, a plug, a
signal interface, a bunching device and an internal test unit, and is characterized in that the internal test unit consists of a
piezoelectric motor, a sample table and a needle frame and is fixed at one end of the outer cavity; the outer cavity is provided with an opening which is detachably connected with the sealing cover and the
signal interface, the sealing medium is used for sealing the joint, the plug is detachably connected with the sealing cover, and the bunching device is fixed in the outer cavity. A relatively sealed space can be formed by the outer cavity, the
signal interface, the sealing cover and the sealing material, and the to-be-detected material is mounted and transferred in the sealed space, so that the to-be-detected material is prevented from being in contact with the external space to be deteriorated in the transferring process; after the sample is transferred, the seal is broken through the action of internal and
external pressure difference, and the sample enters a vacuum environment; and the
data acquisition work including but not limited to the air sensitive material is realized under the control of an external controller by utilizing an internal test unit.