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62 results about "Metallogorgia" patented technology

Systems and methods for high performance metal droplet ejection via meniscus control enabled by multi-part ejection nozzle

The present disclosure relates to a liquid metal jetting ejection nozzle having a nozzle main body and a wetting plate. The nozzle main body has an enlarged opening at a distal end through which a molten metal feedstock material flows during a liquid metal jetting operation, and is formed from a first material having a first wetting characteristic. The wetting plate has an aperture and is secured to the enlarged opening of the nozzle main body. The wetting plate has a second wetting characteristic of a magnitude less than the first wetting characteristic to at least inhibit wetting. This two piece nozzle construction enables optimum materials and construction / fabrication techniques to be used for both components, thus improving performance, durability and reliability of the ejection nozzle.
Owner:LAWRENCE LIVERMORE NAT SECURITY LLC

Coordination complex curable fluids to coat substrates with metal carbides

Coordination complexes are provided comprising at least one metal atom; and organic ligands comprising one or more coordination sites associating with the at least one metal atom. Related methods and articles having a metal carbide coating are also provided, the metal carbide coating being derived from one or more coordination complexes.
Owner:WOLFSPEED INC

Method for rapidly testing growth tendency of metal whiskers and in-situ growth of metal whiskers

According to the method for rapidly testing the growth tendency of the metal whiskers and growing the metal whiskers in situ, the MAX phase serves as an A metal atom source, the growth tendency of the metal whiskers is rapidly tested, and a new technology for preparing the metal whiskers in a large scale is developed by means of the phenomenon. According to the method, an MAX phase and an alloy matrix form metallurgical bonding through hot pressing, active A atoms are provided for growth of the metal whiskers, and therefore reliable and rapid detection of the growth tendency of the metal whiskers on the to-be-detected alloy is achieved. The innovation and significance of the invention are as follows: (1) A-site atoms provided by the MAX phase are utilized to test the accommodation limit of different alloy components and organization structures to active A atoms, a new rapid and reliable metal whisker growth tendency evaluation technology is developed, and the method has important significance in evaluation of Sn whisker growth problems in electronic connection; and (2) a new technology for in-situ and rapid growth of the metal whiskers in the metal matrix is developed, and a new technical approach is provided for preparation of micro-nano devices such as MEMS (micro-electromechanical systems) and the like.
Owner:SOUTHEAST UNIV

Metal borohydride composite material, preparation method thereof and hydrogen storage material

PendingCN121361769AHydrogenMonoborane/diborane hydridesCarbon monofluorideChemical reaction
The invention belongs to the technical field of hydrogen storage materials, and particularly relates to a metal borohydride composite material, a preparation method thereof and a hydrogen storage material. The preparation method comprises the following steps: activating the carbon-based carrier by adopting an alkaline substance; performing gas-phase fluorination treatment on the activated carbon-based carrier; the carbon fluoride-based carrier is mixed with a metal source, a boron source and a solvent, a solvothermal reaction is driven by hydrogen, metal borohydride is synthesized in situ on the surface of the carbon fluoride-based carrier, metal atoms in the generated metal borohydride react with F atoms in the carbon fluoride-based carrier to form a metal-F bridging phase, and meanwhile, the metal borohydride generates metal vacancies. The metal affinity of fluorine in the carbon fluoride-based carrier is utilized to induce nucleation loading of the metal borohydride in the synthesis process of the metal borohydride, and meanwhile, an interface chemical reaction is carried out to generate vacancies and bridging phases. Vacancies weaken B-H bonds, the hydrogen absorption and desorption heat / dynamics of the material are improved, and the bridging phase improves the structural stability and hydrogen absorption and desorption cycle performance of the material.
Owner:SHENZHEN MSU-BIT UNIVERSITY

Resist composition and pattern forming method

To provide a resist composition which, in photolithography employing high-energy radiation, exhibits superior sensitivity, resolution, and LWR, maintains stability, and allows easy handling, and a pattern forming method using the resist composition.SOLUTION: A resist composition contains a metal complex having a metal atom and a ligand represented by the following formula (1a), (1b), or (1c). (In the formulae, R1, R2, R3, R4, R5, R6, and R7 are each independently a hydrogen atom, a carbonyl group, or a hydrocarbyl group having 1 to 20 carbon atoms which may contain a hetero atom. *1 and *2 represent bonding hands to the metal atom).SELECTED DRAWING: None
Owner:SHIN ETSU CHEMICAL CO LTD

A metal sheet pressing and compounding device

The present invention discloses a metal sheet pressurized composite equipment, which belongs to the field of metal material processing technology, and includes: an unwinding mechanism, a feeding mechanism, a conveying mechanism, a heating mechanism, a rolling mechanism and a cooling mechanism, wherein the heating mechanism includes: a heating shell, an electromagnetic heater, a waste heat recovery mechanism and a first infrared thermometer, and the electromagnetic heater and the first infrared thermometer are fixedly installed in the heating shell. The present invention realizes precise alignment and efficient composite of multi-layer sheets by cooperatively driving the unwinding, feeding and rolling mechanisms by multiple motors; adopts an electromagnetic heater combined with an infrared thermometer to dynamically adjust the power to ensure uniform and stable heating of the sheet, effectively activates the diffusion capacity of metal atoms and reduces the yield strength, and adjusts the pressure roller spacing through hydraulic cylinder linkage to realize progressive pressurized composite; combines intelligent temperature control and centrifugal drive cooling system to synchronously trigger air cooling and water cooling to coordinate cooling, greatly improve cooling efficiency, and quickly solidify the metallurgical bonding interface.
Owner:SUZHOU HANGE NEW MATERIAL TECH CO LTD

Connection structure, metal atom-containing particles and bonding composition

A connection structure in which the occurrence of warping and cracking is suppressed even when stress is applied to the connection structure, and metal atom-containing particles and a bonding composition used for assembling the connection structure are provided. [Solution] A connection structure A includes a metal atom-containing particle 10 and an adhesive layer 50 including a sintered body 20 of metal particles. The metal atom-containing particle 10 and the sintered body 20 are in contact with each other through a chemical bond, and in the cross section of the adhesive layer 50, 5% or more of the outer periphery of the metal atom-containing particle 10 is in contact with the sintered body.
Owner:SEKISUI CHEMICAL CO LTD

Metal target material and preparation method thereof

The invention relates to the technical field of target material preparation, and provides a metal target material and a preparation method thereof.The preparation method comprises the steps that metal raw materials are heated and melted to form melt; carrying out downward continuous casting treatment on the melt to obtain a metal slender rod; the thin metal rod is subjected to continuous upsetting treatment with the deformation quantity exceeding 400%, and a thick metal rod is obtained; the thick metal rod is subjected to continuous extrusion treatment, and a metal pipe is obtained; and carrying out heat treatment on the metal tube, and then machining to obtain the metal target material. According to the preparation method of the metal target material, the melt is treated through downward continuous casting, the high-purity and fine metal rod can be prepared, subsequent continuous upsetting is facilitated to achieve super-large deformation, coarse grains in the metal thin rod are effectively crushed, and the metal thick rod with fine and uniform grains is obtained; the problem that when a large cast ingot is obtained through traditional smelting and casting and then forged, the uniformity of crystal grains is difficult to control accurately is solved, meanwhile, the situation that continuous production of target materials is affected by an intermittent multi-pass forging mode is avoided, and the production efficiency is remarkably improved.
Owner:HUNAN ZHONGCHENGDA MATERIAL TECHNOLOGY CO LTD

Method for calculating valence states of metal atoms in metal organic framework material

The invention discloses a method for calculating valence states of metal atoms in a metal organic framework material, which comprises the following steps of: firstly, acquiring. Cif files of original metal organic frameworks (MOFs) from a CSD database, carrying out bonding on the. Cif files by using an open-source xyz2mol program, outputting corresponding bonding information, and then deleting the metal atoms of the MOFs structure; calculating the RSD value of the non-metal framework according to the bonding information of all non-metal atoms, and calculating the total charge of the non-metal framework according to the relation between the RSD and the TSD of the elements; reversely deducing the oxidation state of the metal atoms by using the fact that the complete MOFs present charge balance; and finally, comparing the metal oxidation state numerical value with a numerical value provided by a CSD database, and evaluating the accuracy and feasibility of the method. According to the method, the metal center oxidation state value in the MOFs can be efficiently calculated, so that whether the MOFs meet the requirement of skeleton neutrality or not is judged.
Owner:XUZHOU NORMAL UNIVERSITY

Automatic metal powder feeding device

The utility model discloses an automatic metal powder feeding device which comprises a feeding frame, an anti-blocking mechanism and a buffering mechanism, the anti-blocking mechanism and the buffering mechanism are both installed at the upper end of the feeding frame, a first electric telescopic rod is installed at one end of a supporting frame, an extending frame is installed at the output end of the first electric telescopic rod, and a second electric telescopic rod is installed at one end of the extending frame. A mounting cover is mounted at the output end of the second electric telescopic rod, a motor is mounted in the mounting cover, and a dredging drill bit is connected to the bottom of the mounting cover in a penetrating mode. According to the metal raw material dredging device, when the blockage phenomenon occurs when metal raw materials are discharged through the feeding pipe, the first electric telescopic rod is started to push the extension frame, the dredging drill bit on the extension frame is located below the feeding pipe, then the dredging drill bit stretches into the feeding pipe to conduct stirring dredging through the second electric telescopic rod and the motor drive, frequent manual dredging by workers is not needed, and the working efficiency is improved. The problem that in actual operation, metal powder raw materials are prone to being frequently blocked in the feeding process, and the metal powder machining efficiency is affected is solved.
Owner:杜凯歌

Gas-liquid channel separation type uniform metal microdroplet stable spraying device

InactiveCN120662820AGas passingShielding gas
The invention belongs to the technical field of uniform metal microdroplet jetting devices, and particularly relates to a gas-liquid channel separation type uniform metal microdroplet stable jetting device which comprises a high-temperature heating furnace used for heating metal raw materials; the crucible is located in the high-temperature heating furnace and used for containing metal raw materials and a solution of the metal raw materials; and the spraying assembly comprises an outer runner, a nozzle and a control assembly, and the outer runner is connected to the bottom of the high-temperature heating furnace. By arranging the control assembly, when protective gas passes through the gap between the outer flow channel and the nozzle, the counterweight ring can always apply upward push to the sealing plug through the ejector rod, so that the sealing plug can always cooperate with the sealing ring to apply pressure to the protective gas passing through the gap between the sealing plug and the sealing ring; therefore, the protective gas is always kept at a certain pressure when passing through the gap between the nozzle and the nozzle, turbulent flow generated near the nozzle due to insufficient pressure of the protective gas is avoided, and the stability of metal jet flow is ensured.
Owner:CHANGSHA AVIATION VOCATIONAL & TECH COLLEGE (AIR FORCE AVIATION MAINTENANCE TECH COLLEGE)

Method for carbothermic smelting of a metal-containing feedstock using hot oxidizing gas

The present invention relates to a method of smelting a metalliferous feed material. More particularly, the present invention relates to a method of smelting composite agglomerates comprising a metalliferous feed material, a reducing agent and a fluxing agent using a hot oxidising gas. According to a first aspect of the invention, there is provided a method of carbothermic smelting of a metalliferous feed material using an oxidising gas, comprising the steps of: (i) feeding composite agglomerates into a reactor to create a packed bed within the reactor; wherein the agglomerates comprise a metalliferous feed material, a reducing agent and a fluxing agent; (ii) heating and smelting the agglomerates using a hot oxidising gas, wherein the hot oxidising gas enters the reactor and passes through the packed bed to form a molten material comprising an intermediate slag component and a partially reduced metalliferous component; (iii) introducing the molten material into an electric slag cleaning furnace; (iv) adding additional reducing agent to the molten material in the electric slag cleaning furnace to form a liquid metal product, a liquid slag product and a CO-containing gas; and (v) combusting the CO-containing gas with preheated air to form a hot oxidising gas enriched in oxygen which then enters the reactor in step (ii); wherein the temperature of the hot oxidising gas entering the reactor is controlled to be above 1400°C, and wherein the oxygen content of the hot oxidising gas is controlled to be between 0% and 20%.
Owner:AFRICAN RAINBOW MINERALS LTD

Double-station semi-solid metal forming machine

ActiveCN223642744UMetal formingThermodynamics
The utility model relates to a double-station semi-solid metal forming machine which comprises a first mold device, a second mold device and a third mold device, the first spiral feeding device is connected with the first mold device and used for conveying the metal raw materials; the first heating device is arranged on the first spiral feeding device and used for heating the metal raw materials into a semi-solid state; the second mold device is used for metal forming; the second spiral feeding device is connected with the second die device and used for conveying the metal raw materials; the second heating device is arranged on the second spiral feeding device and is used for heating the metal raw material into a semi-solid state; the first mold device and the second mold device are arranged at the two ends of the rack correspondingly, and the first spiral feeding device and the second spiral feeding device are both installed on the rack and arranged in a staggered mode. According to the double-station semi-solid metal forming machine, two stations are obtained through staggered arrangement, and the double-station semi-solid metal forming machine is compact in structure, small in occupied area, high in production efficiency, low in production cost, low in forming temperature, high in production safety and low in energy consumption.
Owner:NINGBO DEMA INTELLIGENT MACHINERY CO LTD

Metal-organic framework, gas adsorbent, kneaded yarn, textile product, and resin composite

Disclosed is a metal-organic framework which has at least one metal atom selected from the group consisting of Zr, Zn, Al, and Mg, and an organic ligand that has at least one group selected from the group consisting of a carboxy group and a carboxylate group, and which includes a partial defect of the organic ligand.
Owner:TOAGOSEI CO LTD

Method of introducing a metalliferous feed in an ironmaking process

A method of introducing a metalliferous feed in an ironmaking process, the method including the steps of, pre-drying an iron containing sludge by drying means to an amount of 15 to 30% (w / w) moisture, mixing the pre-dried iron containing sludge with a binder material to obtain a granulate, having a particle size of less than 4 millimeter and drying the granulate to a maximum of 3% (w / w) moisture, thereby forming the metalliferous feed, wherein the metalliferous feed is subsequently injected into a cyclone part of a metallurgical vessel.
Owner:TATA STEEL IJMUIDEN BV

A covalent triazine nanosheet loaded with metal atoms and its preparation method and application

The present application belongs to the technical field of porous organic polymers and specifically provides a covalent triazine nanosheet loaded with metal atoms and a preparation method thereof, comprising the following steps: 1) mixing a triazine monomer and a carboxyl group-containing monomer, adding a catalyst for reaction, grinding the resulting product and immersing it in an alkaline solution, then washing it with a solvent and drying it to obtain CTF-COOH; 2) mixing the CTF-COOH obtained in step 1) with water and grinding it, then washing and drying it to obtain CTF-COOH-NSs; 3) dispersing the CTF-COOH-NSs obtained in step 2) into a loading solution, immersing it in a solution, heat-insulating it for reaction, washing it, and drying it to obtain MCTF-R X The metal atom-loaded covalent triazine nanosheets prepared in the present application have the advantages of uniform distribution of metal single atom active sites, high catalytic performance, and physical and chemical stability.
Owner:XINNENG TIMES (HANGZHOU) TECHNOLOGY CO LTD

Metallic indium purification device and purification method

The invention provides a metallic indium purification device and purification method, and relates to the technical field of metallic indium purification devices, the metallic indium purification device comprises a stock solution purification assembly, a crystallization chamber, an acid pickling chamber and an ultrasonic cleaning assembly; the stock solution purification assembly comprises a purification tank and a stirring part, a scum collector is arranged above the inner side of the circumference of the purification tank, the purification tank is used for containing metal stock solution and compounds needing to participate in the reaction, and the stirring part is used for stirring the metal stock solution and the compounds so that the metal stock solution and the compounds can fully react. The device has the beneficial effects that the stock solution purification assembly combines chemical conversion and physical separation, stock solution and compounds are promoted to fully react through the stirring part, generated solid impurities are directionally pushed to precipitate waste residues to the waste residue output port through the sludge push plate, and floating residues are collected to the floating residue collector through cooperation of the floating object push plate and the collecting plate; precipitation and floating impurities are synchronously removed, the content of solid impurities in purified molten metal is remarkably reduced, and the requirement of a subsequent crystallization process is met.
Owner:KAIDI TEC & DEV CO LTD

Resist composition and pattern forming process

The resist composition comprises a metal complex containing a metal, typically zinc and a specific ligand exhibits a high sensitivity, high resolution and improved LWR when processed by photolithography. The composition is stable during storage and easy to handle. The resist composition comprises a metal complex containing a metal atom and a ligand having the formula (1a), (1b) or (1c). R1, R2, R3, R4, R5, R6 and R7 are each independently hydrogen, a C2-C20 hydrocarbylcarbonyl group which may contain a heteroatom, or C1-C20 hydrocarbyl group which may contain a heteroatom, *1 and *2 each designate a point of attachment to the metal atom.
Owner:SHIN ETSU CHEMICAL CO LTD

Using pelletized metal-decorated materials in an induction melting furnace

ActiveUS12668865B2InconelSuperalloy
Metal(s) (including various alloys, such as INCONEL® superalloys) are characterized by having carbon disposed within the metal lattice structure thereof. The carbon is primarily, or entirely, present at interstitial sites of the metal lattice, and may be present in amounts ranging from about 1.5 wt % to about 90 wt %. Carbon may be present in the form of graphene, which may be characterized as one or more coherent, planar layers of graphene. The carbon, moreover, forms non-polar covalent bonds with both metal atoms of the lattice and other carbon atoms present in the lattice. This facilitates substantially homogeneous dispersal of the carbon throughout the resultant material, conveying unique and advantageous properties such as strength-to-weight ratio, density, mechanical toughness, sheer strength, flex strength, hardness, anti-corrosiveness, electrical and / or thermal conductivity, etc. as described herein. In some approaches, the composition of matter may be powderized, or the powder may be pelletized.
Owner:LYTEN INC

Assigning metal oxidation states

The disclosure relates to a method for assigning metal oxidation states in in silico chemical compounds comprising: assigning to each non-metal atom, a respective formal charge; determining binding sites; determining binding domains; for each respective binding domain, computing the sum of the respective formal charge assigned to each respective atom of the respective binding domain; equally splitting the sum respective to each binding domain among each binding site of the binding domain; for each respective metal atom having a bond with at least one binding site, calculating a respective oxidation value being equal to the sum of, for each of the at least one binding site, the opposite of the division of the respective transitory formal charge by a number of respective metal atoms having a bond with the binding site; computing a first oxidation state for each respective metal atom computed based on the respective oxidation value.
Owner:TOTALENERGIES ONETECH +1

Metal-organic framework material separation membrane, preparation method therefor, and use thereof

A metal-organic framework material separation membrane and a preparation method for the metal-organic framework material separation membrane are provided. The metal-organic framework material separation membrane has a base membrane and a metal-organic framework material functional layer. The metal-organic framework material functional layer comprises has an inter-embedded polyhedron structure. The preparation metal-organic framework material separation membrane includes the steps of: (1) preparing a solution containing a first organic solvent, an organic ligand, a metal compound, and an auxiliary agent; (2) subjecting a base membrane to a pretreatment, involving introducing, on the surface of the base membrane, metal atoms from the metal compound of step (1); and (3) mixing the pretreated base membrane of step (2) with the solution of step (1) to obtain a first mixture, and then heating the first mixture for reaction, so as to prepare a metal-organic framework material separation membrane.
Owner:CHINA PETROLEUM & CHEMICAL CORP +1

Monatomic material and preparation method thereof

The invention relates to the technical field of material science and engineering, and discloses a monatomic material and a preparation method thereof, which can effectively prevent metal atom aggregation and realize high-universality and high-load monatomic preparation. The method comprises the following steps: dissolving a metal precursor in an acidic aqueous solution, and placing a carrier material in the acidic aqueous solution to form a reaction system containing the solution and the carrier material; freezing the reaction system to a solid state; performing electrochemical reduction on the reaction system in a solid frozen state, so that metal ions from the metal precursor are reduced and loaded on the carrier material; and unfreezing and washing the carrier material subjected to electrochemical reduction to obtain the monatomic material.
Owner:JUJIAOXINCHUANG MEDICAL ELECTRONICS (SHANGHAI) CO LTD +1

A detection experimental device for low temperature tensile test of metal material at minus 196 degree celsius

The application relates to the technical field of detection of low-temperature stretching of metal materials, and discloses a detection experiment device for low-temperature stretching of metal materials at minus 196 DEG C, which comprises a detection device main body, an observation protection door arranged on the surface of the detection device main body, a control panel arranged on the surface of the detection device main body, a support fixedly connected to the inner wall of the detection device main body, a support frame fixedly connected to the surface of the support, a clamping protection device arranged on the surface of the support, and a sealing leakage-proof device arranged on the surface of the support. When the machine performs a low-temperature stretching test on metal raw materials, the motor is started to drive the threaded rod to rotate, the threaded rod drives the moving plate to move when rotating, the moving plate drives the clamping block to move when moving, so that the clamping block clamps and fixes the condensing cylinder when the machine performs a low-temperature stretching test on the metal raw materials, and the detection result is not affected by the shaking of the condensing cylinder when the machine performs a test on the metal raw materials.
Owner:XIAN MODERN PHYSICAL & CHEM TESTING SERVICE CO LTD

Clamping clamp for metal electroplating material taking

The utility model discloses a metal electroplating material taking clamp which comprises a fixing column, a second bearing is welded to one end of the fixing column, a fixing frame is connected to the bottom of the second bearing, a second clamping plate is installed on the surface of the fixing frame, a fixing rod is fixedly connected into the second clamping plate, and a spring is connected to the surface of the fixing rod in a sleeved mode. The first clamping plate is sleeved with the second clamping plate. According to the clamping clamp for metal electroplating material taking, a second bearing is welded to one end of the fixing column, meanwhile, a fixing frame is connected to the bottom of the second bearing, and a second clamping plate is installed on the surface of the fixing frame, then metal raw materials can be electroplated, after electroplating is completed, a pressing ring can be pressed, and a soft plate is pressed through the pressing ring; and then the first clamping plate is uniformly pulled by the soft plate, so that the first clamping plate is separated from the metal raw materials, at the moment, all the metal raw materials clamped on the device can be taken down, and the device is very convenient to use.
Owner:益阳佰泰莱电子有限公司

Metal raw material crushing device

The utility model provides a metal raw material crushing device, and relates to the technical field of metal raw materials. The metal raw material crushing device comprises a box body, a crushing mechanism is arranged in the box body, a collecting and screening mechanism used for collecting and screening crushed metal raw materials is arranged in the box body, the crushing mechanism comprises a connecting block and a rotating shaft, and the rotating shaft is rotationally connected to one side of the box body; the connecting block penetrates through one side of the box body and is rotationally connected with one side of the box body, and the connecting block is slidably connected to the surface of the inner wall of the rotating shaft. According to the metal raw material crushing device, by arranging the crushing mechanism, the problems that crushing rollers of previous crushing equipment are difficult to replace, the crushing rollers are prone to being abraded after the device is used for a long time, the crushing particle size is not uniform, and then the crushing efficiency is affected are solved, and the crushing rollers can be simply and conveniently replaced; the maintenance cost is reduced; and the crushing efficiency is prevented from being influenced by the abrasion of the crushing roller.
Owner:SHANGHAI DUOWEIYI IND CO LTD

Covalent organic framework material for regulating metal coordination distance, preparation method thereof and application of activated pms in degrading pollutants

The application discloses a kind of covalent organic framework materials for regulating metal coordination distance and its preparation method and the application of activated PMS degradation pollutants, on the basis of original metal porphyrin, by the coordination connection metal atom in the position of intermediate connecting group, not only increase the load of metal, also greatly shorten the distance between two adjacent metal atoms, enhance electron transfer efficiency, improve the catalytic activity of framework material;Make the framework material show excellent catalytic activity.Covalent organic framework material is prepared by solvothermal reaction, continue to react with metal precursor can be loaded on metal, the preparation method is simple, does not need complex reaction process and harsh reaction condition, can be prepared in large scale.
Owner:GUANGDONG UNIV OF TECH

Preparation and application of a metalloporphyrin-based porous polyionic liquid

The application discloses a kind of preparation and application of metal porphyrin-based porous polyionic liquid.The general formula of the metal porphyrin-based porous polyionic liquid is: [M-R1-(R)4] n ;M is metal atom;R1 is porphyrin compound;R is selected from one of halogen-containing compounds.The metal porphyrin-based porous polyionic liquid is constructed by metal porphyrin and halogen-containing compound as organic unit, so that the metal porphyrin-based porous polyionic liquid has three-dimensional structure, the porous polyionic liquid has good chemical stability and controllable pore size, has high specific surface area, improves catalytic performance, realizes efficient and high-selectivity catalytic reaction.The metal porphyrin-based porous polyionic liquid prepared by the application is especially suitable for catalyzing the cycloaddition reaction of carbon dioxide and epoxide, has high selectivity and strong adsorption force for carbon dioxide, and can efficiently and high-selectively catalyze to generate cyclic carbonate.
Owner:GUANGDONG UNIV OF TECH

A method and system for metal atomic layer deposition

PendingCN122303839AThin membraneControl valves
This application discloses a method and system for metal atomic layer deposition. The method includes: with the control valve at the outlet of the reaction chamber closed, supplying a metal source to the reaction chamber so that the metal source is adsorbed onto the surface of a substrate in the reaction chamber; controlling the control valve to be in an open state in response to the continuous supply time of the metal source to the reaction chamber being greater than or equal to a first supply time threshold; supplying purge gas to the reaction chamber in this state; supplying reactants to the reaction chamber to form a metal film on the substrate; and supplying purge gas to the reaction chamber. Thus, by keeping the control valve closed during the supply of the metal source to the reaction chamber, the metal source can be filled into the reaction chamber, increasing the residence time of the metal source in the reaction chamber, allowing the metal source to be uniformly adsorbed onto the substrate surface. Then, reactants are supplied to the reaction chamber, allowing the reactants to react with the metal source adsorbed on the substrate surface, thereby adsorbing a uniform thin film onto the substrate.
Owner:JIANGSU MICROVIA NANO EQUIP TECH CO LTD