The utility model discloses a
photoresist bubble removing device which comprises a cylinder body, the right side of the cylinder body is fixedly connected with a feeding
pipe communicated with the cylinder body, the feeding
pipe is communicated with a charging
pipe, the left side of the cylinder body is communicated with a discharging pipe, the feeding pipe and the discharging pipe are respectively provided with a first
electromagnetic valve, and a second
electromagnetic valve is arranged on the discharging pipe. A vacuum pipe is communicated with the left side of the cylinder body, a
vacuum pump is mounted on the vacuum pipe, a rotating rod is rotatably connected to the inner wall of the cylinder body, and stirring rods which are uniformly distributed are fixedly connected to the rotating rod. According to the utility model, when the
photoresist is subjected to vacuum defoaming, the
photoresist can be stirred, and bubbles in the photoresist can be promoted to move to the surface of a photoresist solution more quickly by stirring, so that the photoresist can be expanded and broken more easily in a vacuum environment, the defoaming efficiency is improved, the photoresist can be uniformly distributed in a container by stirring, local bubble aggregation is avoided, and the defoaming efficiency is improved. And the defoaming effect is more thorough.