The present disclosure provides a
pressure sensor, a manufacturing method of the
pressure sensor, an
air conditioning device and a vehicle. The
pressure sensor comprises a
silicon substrate, a plurality of doped leads, a plurality of piezoresistors, a plurality of contact plugs and a sealing cover. The
silicon substrate comprises opposite first and second surfaces, and the second surface is formed with a cavity. The plurality of doped leads are located in the
silicon substrate and close to the first surface. The plurality of piezoresistors are formed on the first surface of the silicon substrate and correspondingly connected with the plurality of doped leads. The plurality of piezoresistors correspond to the position of the cavity. The plurality of contact plugs are formed on the first surface of the silicon substrate and correspondingly connected with the plurality of doped leads. The sealing cover is buckled on the substrate to form a
closed cavity between the substrate, the plurality of piezoresistors are located in the
closed cavity, and at least part of the sealing cover is connected to the region between the piezoresistors and the contact plugs on the first surface. The pressure sensor provided by the present disclosure improves the reliability of the pressure sensor.