The invention provides a
welding method of an aluminum target
assembly. The
welding method comprises the steps that an aluminum target and an aluminum back plate are provided; a
brazing filler metal wetting layer is formed on the surface, to be welded, of the aluminum target or the surface, to be welded, of the aluminum back plate; the aluminum back plate and the aluminum target with the formed
brazing filler metal wetting layer are placed in a vacuum packaging sleeve, and the surface, to be welded, of the aluminum back plate makes contact with the
brazing filler metal wetting layer, or, the aluminum target and the aluminum back plate with the formed brazing filler
metal wetting layer are placed in the vacuum packaging sleeve, and the surface, to be welded, of the aluminum target makes contact with the brazing filler
metal wetting layer; the aluminum target, the brazing filler
metal wetting layer and the aluminum back plate are welded together through a
hot isostatic pressing technology so as to form the aluminum target
assembly; after
welding is accomplished, the vacuum packaging sleeve is cooled and removed to obtain the aluminum target
assembly. By means of the welding method, welding between the aluminum target and the aluminum back plate can be achieved, the welding efficiency is high, the formed aluminum target assembly is high in welding strength and low in deformation, and the demand of long-term stable production and usage of targets can be met.