The utility model relates to a kind of
cathode waterway improved device based on magnetron
sputtering, including
cathode shell, cover and cooling box, cover is installed in the top of
cathode shell, the inside fixed mounting of cathode shell is partition, the lower portion of partition is provided with circulating
cooling pipe, the both ends of circulating
cooling pipe are all set up in the side of cathode shell, and the both ends of circulating
cooling pipe are all fixedly connected with cooling box side, the lower portion of cathode shell is installed with the heat dissipation component capable of improving
cooling effect, and heat dissipation component includes fixedly installed in the lower portion of cathode shell Radiator fan.The utility model is through the cooperation of heat dissipation component and circulating cooling
pipe, further reduce cathode component temperature, avoid target
material deformation due to high temperature, magnetic property attenuation, improve
coating quality, solved the existing device generally only through waterway single heat dissipation, not formed multidimensional collaborative cooling
system, only through
pipe wall and heat
contact type heat exchange, heat exchange mode is single, and the problem of poor heat dissipation effect.