The invention discloses a compound thin film
heterojunction and a preparation method and application thereof, and belongs to the technical field of
semiconductor manufacturing and nano materials. The preparation method comprises the steps that a substrate with an AxBy thin film is provided, A is a
metal element, B is a
chalcogenide element,
ion irradiation is conducted on the AxBy thin film through an
ion beam, the specific element B is selectively and preferentially removed through the intrinsic
sputtering yield difference of the
ion beam on different elements in the thin film, and therefore the controllable component gradient is actively constructed in the
depth direction of the thin film; when local components reach a
phase change critical point, in-situ
induction phase change is carried out in the thin film, and a vertical
heterojunction with an atomic-scale
diffusion interface is formed. The method is completed in one step, the process is simple, the position of the
heterojunction can be accurately regulated and controlled through
irradiation parameters, and the obtained heterojunction can be used for preparing
semiconductor devices such as high-speed transistors,
laser diodes, photoelectric detectors and solar cells.