The invention belongs to the technical field of
semiconductor processes, and in particular to a method for preparing a
hybrid integrated
fiber optic
gyroscope optical
chip. The
chip comprises a substrate, a
light source, a
silicon-based 3dB coupler, a
lithium niobate Y
branch phase modulator and a
signal detector, the
silicon-based 3dB coupler is based on the
silicon-based
silicon dioxide opticalwaveguide technology and comprises a Y
branch waveguide, two 90-degree circular arc waveguides, a tapered
waveguide and two straight waveguides, which communicate with each other, a wide end of the tapered
waveguide is used as an optical input port of the optical
chip, the
light source is aligned to the optical input port, the straight waveguide connected with a Y
branch is used as a
signal outputport of the optical chip, a photosensitive surface of the
signal detector is aligned to the signal output port, and the straight waveguide connected with the 90-degree circular arc waveguide is usedas an optical transmission port and is spiced and fixed with a base waveguide end face of the
lithium niobate Y branch phase modulator 3 through a
waveguide coupling process. By adoption of the methodprovided by the invention, an
optical fiber fusion point is removed, and the method has the advantages of high integration degree, small volume, low
power consumption, good performance, good reliability and environmental adaptability, etc.