4results about How to "Uniform coating effect" patented technology

The invention relates to a composition for forming a wafer edge protection film, a method for forming a wafer edge protection film, and a method for forming a pattern. The present invention addresses the problem of providing a composition for forming a wafer edge protection film, said composition being capable of providing a wafer edge protection film that can exhibit excellent dry etching resistance and that can exhibit excellent uniform coating properties even on a wafer edge that is difficult to coat. The solution of this problem is to provide a composition for forming a wafer edge protective film, which is used for forming a wafer edge protective film at the peripheral edge of a substrate, and which is characterized by containing a polymer (A) represented by general formula (1) and a solvent. In the formula, W is-SO2-,-C (= O)-or-O-, R1, R2, R3, R4 and R5 are each independently a halogen atom, a monovalent organic group having 1-3 carbon atoms, or a hydroxyl group, and a, b, c, d and e are each independently an integer of 0-4.

The present application relates to the technical field of industrial robot spare parts, in particular to a mute type ball nut noise reduction structure for an industrial robot and a method thereof, comprising a mute sleeve set on the outside of a lead screw, the mute sleeve comprising a nut, a bushing mounted on the nut, and a plurality of balls. The mute sleeve is further provided with a filler, the filler comprising a filler tube with a grease storage cavity inside, and a pair of lifting rings, a rotating plug, and an extrusion part coaxially arranged inside the filler from top to bottom. The present application applies continuous pressure on the lubricating grease in the grease storage cavity through the extrusion part, cooperates with the material passage gap in the convex rod which is in contact with the thread groove of the lead screw, realizes continuous and uniform coating of the lubricating grease to the thread groove of the lead screw, and automatically brings the lubricating grease to the ball load track and the circulation channel with the rotation of the lead screw and the movement of the nut, realizes continuous self-lubrication without manual intervention, and effectively reduces the friction noise caused by insufficient lubrication.

This invention relates to an anode material, its preparation method, and its application. The anode material comprises carbon nanotubes and a silicon layer coating the carbon nanotubes. The anode material of this invention can reduce the resistance of the anode sheet, improve rate performance, and further alleviate the volume expansion problem. Furthermore, by combining single-walled and multi-walled carbon nanotubes, the anode material possesses a richer microporous and mesoporous structure, which can further provide a buffer gap for silicon expansion. Moreover, by configuring the carbon nanotubes to include both single-walled and multi-walled carbon nanotubes, a highly efficient conductive network can be achieved, resulting in high conductivity and further improving the rate performance of the anode sheet.