1results about How to "Improve compact strength" patented technology

The present application relates to a kind of preparation methods of niobium tube target material, belong to the preparation technical field of tubular target material for magnetron sputtering, the present application uses niobium powder as raw material, designs special cold isostatic pressing tooling, successively after granularity control proportioning and mechanical uniform mixing, cold isostatic pressing structure assembly, powder filling and cold isostatic pressing, cold isostatic pressing compact machining, hot isostatic pressing structure assembly, vacuum hot degassing of sheath, sheath hot isostatic pressing and machining process preparation niobium tube target material, the niobium tube target material prepared by the present application has the characteristics of high density, uniform structure, small radial thickness deviation, good straightness, controllable length-diameter ratio, and integral binding with back tube forming, etc., coating film applicability is wide, test shows that its relative density is ≥99%, oxygen content is ≤2500ppm, structure is uniform, radial thickness deviation is ≤0.3mm, straightness is ≤1mm, length-diameter ratio is controllable in the range of 8:1~20:1.