The invention discloses an aluminum
molybdenum etching solution as well as a preparation method and application thereof, and relates to the technical field of
etching agents. Comprising a
solvent and functional components, and the functional components comprise fluoroantimonic acid,
sorbic acid, 1-hydroxyethylidene-1, 1-diphosphonic acid,
fluoride and
sulfate. Two organic weak acid oxidants, namely 1-hydroxyethylidene-1, 1-diphosphonic acid and
sorbic acid, are added into functional components, and fluoroantimonic acid is used as a main oxidant to oxidize two metals, namely
molybdenum and aluminum, so that the relative
etching rate is changed. Then,
sorbic acid is used as an auxiliary
oxidizing agent or a buffer
system, and in the etching process, the sorbic acid can ionize
hydrogen ions along with the change of time to adjust the etching speed. Through the combination of fluoroantimonic acid and sorbic acid, the phenomenon that the etching speeds of
molybdenum and aluminum are inconsistent can be remarkably improved, indentation or trailing of a
metal layer is avoided, the residual phenomenon in the reaction process is reduced in cooperation with the action of 1-hydroxyethylidene-1, 1-diphosphonic acid,
fluoride and
sulfate, and the product yield is increased.