This invention relates to the preparation of
wide bandgap semiconductor materials using
chemical vapor deposition (CVD) technology. It provides
hexagonal boron nitride (h-BN) thin films, their preparation methods, bandgap modulation methods, and a
broadband ultraviolet photodetector. Using
magnesium nitride as the
dopant source, the
dopant source is simultaneously introduced into the epitaxial layer of the h-BN thin film via CVD, achieving in-situ
doping of
magnesium in the h-BN lattice. By controlling the
magnesium doping concentration, the bandgap of the h-BN thin film is modulated from 5.91 eV to 3.38 eV. Based on this magnesium-doped h-BN thin film, a
broadband ultraviolet photodetector is also prepared, broadening the
ultraviolet absorption range to the 185-365 nm band, achieving wide-spectrum, high-sensitivity ultraviolet detection. The
doping process of this invention is controllable, and the bandgap
modulation effect is significant, breaking through the
spectral response limitations of intrinsic h-BN-based detectors and promoting the application of optoelectronic devices in
environmental monitoring, biochemical analysis, and other fields.