The utility model discloses a vacuum heat treatment furnace, belongs to the field of heat treatment equipment, and is used for solving the problem of flow abnormity caused by uneven cooling water distribution,
cooling temperature control deviation and waterway blockage. The vacuum heat treatment furnace comprises a furnace body, a cooling water using part and a cooling water
distribution system, wherein the cooling water
distribution system comprises a water inlet
pipe, a water return
pipe, a water pump, a water inlet
branch pipe, a water return
branch pipe, a flow detection device, a temperature detection device and a control device; the water inlet pipe, the water return pipe, the water inlet
branch pipe and the water return branch pipe are arranged outside the vacuum heat treatment furnace; one end of the water inlet branch pipe is connected with the water inlet pipe, and the other end is connected with the water inlet end of a water using part; one end of the water return branch pipe is connected with the water return pipe, and the other end is connected with the water outlet end of a water using component; the flow detection device is connected with the water return branch pipe; the temperature detection device is arranged on the
water consumption part; the flow detection device, the temperature detection device and the water pump are all electrically connected with the control device.