The invention provides an elastic base / back surface line leading-based micro-electromechanical
system probe card and a preparation method thereof. The preparation method comprises the following steps that: a substrate through hole is slotted on a substrate; a substrate
metal structure is by electroformed the substrate through hole, and a first
metal seed layer is sputtered on the back surface of the substrate; an elastic
polymer layer is in coated on the substrate, and an elastic
polymer through hole structure is prepared on the elastic
polymer layer; an elastic
polymer metal structure is electroformed in the elastic polymer through hole structure; a second
metal seed layer is sputtered on the elastic polymer layer, and a metal circuit layer is prepared on the second metal seed layer; a metal probe structure is prepared on the metal circuit layer; the first and second metal seed
layers are removed, and the substrate is arranged on a
printed circuit board in a
surface mounting manner, such that the elastic base / back surface lead line-based micro-electromechanical systems
probe card can be obtained. According to the elastic base / back surface line leading-based micro-electromechanical
system probe card and the preparation method thereof provided by the invention, a back surface line leading method is adopted so as to directly connect the prepared probe card with a testing
machine stage change-over card; and the elastic base / back surface line leading-based micro-electromechanical
system probe card and the preparation method thereof are advantageous in omission of
spot welding procedures, simplification of process and improvement of rate of finished products.