The invention relates to the technical field of
zinc oxide preparation, and in particular relates to a preparation method of a
nitrogen-doped
zinc oxide film. The preparation method comprises: placing a
silicon substrate in the reaction cavity of
atomic layer deposition (ALD) equipment; introducing gas containing a
zinc source into the reaction cavity of the ALD equipment, wherein the zinc atoms in the gas containing the zinc source are adsorbed to the
silicon substrate; conveying
hydrogen to the reaction cavity of the ALD equipment based on
nitrogen as a carrier gas, and simultaneously carrying out
plasma discharge; introducing an
oxygen-containing source to the reaction cavity of the ALD equipment, wherein the zinc atoms which do not react with
nitrogen atoms form zinc-
oxygen bonds withthe
oxygen atoms in the oxygen-containing source; and repeating the steps, so as to grow the zinc
oxide film containing the nitrogen atoms layer by layer. In the preparation method provided by the invention,
nitrogen doping is carried out on the zinc oxide film by utilizing the ALD equipment; the method is simple and practicable; by utilizing the characteristic of
atomic layer deposition and single-layer cycle growth, the uniform
nitrogen doping in the whole
film structure can be achieved in the process of zinc oxide film growth so that the doped film is complete in structure and excellent inproperty.