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39 results about "Bond rupture" patented technology

Bond Rupture and Formation. Chemical reactions involve bond rupture and formation. In covalently bonded carbon molecules, for example, the bonds can be broken in two ways: symmetrically or asymmetrically. In a symmetrical rupture, each atom in the original covalent bond receives one electron.

Self-repairing anticorrosive coating and preparation method thereof

The invention provides a self-repairing anticorrosive coating. The self-repairing anticorrosive coating comprises the following parts: 0.5 to 5 parts (by weight) of corrosion inhibitor loaded stimulation-responsive mesoporous silicon dioxide and 95 to 99.5 parts (by weight) of resin cured substance. The anticorrosive coating provided by the invention has dual stimulation responsiveness to acids and reducers and can achieve self-repairing. After the coating is destroyed, a local microenvironment changes, a corrosion inhibitor loaded stimulation-responsive mesoporous silicon dioxide shell high polymer, i.e., N-tert-butyl carbonyl in the coating is subjected to hydrolyzed removal (under the stimulation of the acids) or dithio bond rupture (under the stimulation of the reducers) under the stimulation of outside acids or reducers (for instance sulfur ions), the shell high polymer is subjected to hydrophobic-hydrophilic conversion, then, mesoporous silicon dioxide pore passages are exposed,the loaded corrosion inhibitor is quickly released to form a protective film, and corrosion can be effectively inhibited.
Owner:ZHENGZHOU NORMAL UNIV

Organic light-emitting device

The invention discloses an organic light-emitting device. The organic light-emitting device comprises an organic light-emitting layer, wherein the organic light-emitting layer comprises a fluorescentmain material and a fluorescent doping material, and the fluorescent main material contains large-steric-hindrance groups. The organic light-emitting device has the advantages that the distance between the fluorescent main material and fluorescent doping material molecules through the large-steric-hindrance groups, so that the fluorescent main material transmits energy to the fluorescent doping material mainly through a Forster energy transmission mechanism, Dexter energy transmission is inhibited, compound molecular bond rupture caused by the Dexter energy transmission is avoided, and the service life of the organic light-emitting device can be prolonged.
Owner:KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD +1

Ether bond rupturing method for ortho-hydroxyl phenyl alkyl ether

The invention discloses an ether bond rupturing method for ortho-hydroxyl phenyl alkyl ether. The method comprises the following steps that in a solvent, an ether bond rupturing reaction occurs to ortho-hydroxyl aryl alky ether at the temperature ranging from minus 20 DEG C to the catalyst reflux temperature under the existence of alkali and a catalyst aluminum triiodide, and catechol and derivatives thereof are generated. The method is simple, reaction conditions are simple, and operation is easy; besides, the yield is high, and the applicable ortho-hydroxyl phenyl alkyl ether range is wide.
Owner:JINGCHU UNIV OF TECH

Preparation method for Fe-N-C catalytic material with controllable edge active sites

The invention discloses a preparation method for an Fe-N-C catalytic material with controllable edge active sites. Under the premise of keeping the original MOF (metal-organic framework) morphology, the preparation method which adopts the method of in-situ embedded molecular aggregate and then high-temperature pyrolysis is intended to change the dosage of small molecules to regulate the frameworkpore structure and the degree of C-N bond rupture, and realizes the control of edge active site number and chemical environment around a single atom for the first time, thus achieving more excellent electrochemical properties. The method adopts an appropriate dosage of small molecules to obtain a ORR (oxygen reduction reaction) catalyst with the specific surface area of 1392.91m<2> / g, the half-wave potential in 0.1M KOH can reach 0.915V(vs.RHE), and the catalytic performance of the Fe-N-C catalytic material is better than the catalytic performance of commercial platinum-carbon catalyst and similar materials. Therefore, the method realizes atom-level active site control and molecule-level structure control, reference significance is provided for the reasonable design of high-performance single-atom catalysts.
Owner:BEIJING UNIV OF CHEM TECH

Autonomous self-repairing elastomer with high tensile property as well as preparation method and application thereof

The invention belongs to the technical field of functional materials, and particularly relates to an autonomous self-repairing elastomer with high tensile property as well as a preparation method andapplication thereof. The self-repairing elastomer with high tensile property is a product obtained by chemically crosslinking organic silicon resin PSi, a disulfide bond monomer SS, a weak hydrogen bond compound IP and a strong hydrogen bond compound BNS. A dynamic supramolecular polymer network is spontaneously formed in an organic silicon resin polymer main chain, an elastomer has high strengthand high elasticity due to strong cross-linked H bonds, and strain energy is dissipated by weak H bonds through effective reversible bond breakage and reforming; and the disulfide bond is helpful forimproving the self-repairing performance of the elastomer. The dynamically built synergistic effects impart ultra-high stretchability (approximately 14,000%) to the elastomer as well as rapid autonomous self-healing capabilities underwater, in refrigerated (4 DEG C) freezing temperatures (-20 DEG C) or in supercooled seawater (30% NaCl solution at the temperature of -10 DEG C or less).
Owner:TIANJIN UNIV

Fluorescence probe for detecting nitrosyl peroxide by utilizing amido bond rupture and application of fluorescence probe

The invention discloses a fluorescence probe for detecting nitrosyl peroxide by utilizing amido bond rupture and application of the fluorescence probe and relates to fluorescence probes of which fluorescence wavelengths have obvious displacement in the presence of ONOO<->. The invention provides a fluorescence probe capable of selectively detecting ONOO<-> in cells. A BODIPY dye and a naphthalimide dye serve as fluorescence matrixes respectively, an o-benzene selenium (tellurium) benzamide structure is introduced to serve as an activity center reacting with ONOO<->, and the ONOO<-> is selectively detected by utilizing the process of rupturing the amido bond after oxidization of organic selenium (tellurium) ether. Moreover, the influence on the fluorescence wavelength of the whole compound serves as a detection signal for probe identification before and after the amido bond rupture, and the probe is used for detecting fluorescence imaging of the ONOO<-> in the cells.
Owner:ZHANGJIAGANG IND TECH RES INST CO LTD DALIAN INST OF CHEM PHYSICS CHINESE ACADEMY OF SCI

Maleic anhydride grafted polypropylene composition and preparation method thereof

The invention provides a special maleic anhydride grafted polypropylene composition for long-glass-fiber-reinforced polypropylene. The maleic anhydride grafted polypropylene composition comprises the following components in percentage by weight: 94-98% of polypropylene-base compound, 1-5% of maleic anhydride, 0.01-1% of initiator, 0.3-3% of styrene, 0.3-3% of third grafting monomer, 0.1-1% of antioxidant and 0.1-1% of lubricant. The styrene is used as a second grafting monomer, thereby effectively lowering the polypropylene beta- bond ruptures in the reaction process and enhancing the maleic anhydride grafting efficiency; and the introduced polyfunctional group third grafting monomer and styrene have favorable synergistic actions, thereby further enhancing the maleic anhydride grafting efficiency, and being beneficial to forming the branched structure from the polypropylene graft and enhancing the melt viscoelasticity and temperature color distortion resistance during processing.
Owner:FINE BLEND COMPATILIZER JIANGSU CO LTD

Highly abrasion-resistant and high-strength concrete and preparation method thereof

The invention discloses highly abrasion-resistant and high-strength concrete and a preparation method thereof. The highly abrasion-resistant and high-strength concrete comprises the following components in parts by mass: 1058-1147 parts of a binding material, 1120-1271 parts of quartz sand, 165-205 parts of steel fibers, 21.17-22.94 parts of a water reducing agent, 19.41-19.85 parts of an antifoaming agent, 21.17-22.94 parts of an alkali activator, 33.71-36.53 parts of nitrite early strength agents and 127.12-159.62 parts of water. Under the action of the alkali activator, the binding materialcontains lots of Si-O and Al-O bond rupture, SiO4 and AlO4 tetrahedrons are rapidly dissolved out, and lots of inorganic high-molecular polymers are rapidly formed by virtue of condensation polymerization, so that the early strength of the concrete is quickly increased, and the early strength of the high-strength concrete is improved by achieving an effect of catalyzing a cement hydration processby the nitrite. Due to the doped steel fibers, the abrasion resistance of the concrete is improved.
Owner:XI'AN UNIVERSITY OF ARCHITECTURE AND TECHNOLOGY

Domestic refuse suspension-type combustion carbonization pyrolysis system and treatment technique thereof

The invention discloses a domestic refuse suspension-type combustion carbonization pyrolysis system and a treatment technique thereof. The system is sequentially composed of a refuse conveying platform, a suspension-type pyrolysis combustion integrated furnace, a soda lye washer, a honeycomb plasma flue gas treatment device, a power pulse electrochemical photoelectric ion waste gas treatment device, a peculiar smell advanced treatment device containing high-energy oxygen nano water, a deduster and an induced fan. The treatment technique comprises the following steps: carrying out pyrolysis on domestic refuse, combusting, disacidifying by soda lye washing, carrying out plasma ionization to remove dust and tar, carrying out high-power narrow-pulse electron bombardment to promote bond rupture and recombination of stubborn harmful substances, removing flue gas and peculiar smell by using high-energy oxygen water, filtering through the deduster to remove dust, and discharging through the induced fan. The domestic refuse treatment technique disclosed by the invention has the advantages of high decrement degree and higher exhaust emission quality than national standard. The system using the technique has the advantages of low investment, simple operation, high safety and environment friendliness, low carbon and energy saving, and can comprehensively and basically solve the problem in domestic refuse.
Owner:安徽未名科键环境有限公司

Method for subcritical alcohol extrusion stress induced devulcanization of vulcanized rubber powder

The invention relates to a method for subcritical alcohol extrusion stress induced devulcanization of vulcanized rubber powder. The method comprises the following steps: mixing a linear high polymer material accounting for 0 to 30% of the total mass of reactants, waste rubber powder accounting for 65 to 97% of the total mass of the reactants and a devulcanization auxiliary agent accounting for 0.2 to 5% of the total mass of the reactants and subjecting the obtained mixture to a melt extrusion devulcanization reaction in a double-screw extruder with subcritical alcohol extrusion reaction conditions and a high screw speed; and subjecting the reactants to water cooling, striping and drying or to roller calendaring, cooling and sheet formation so as to obtain a devulcanized reclaimed rubber material. According to the invention, the method is an improvement to a conventional method for devulcanization of vulcanized rubber powder under subcritical water extrusion composite induction; solubility and permeability of a devulcanization promoter and the reaction mixture are improved, selectivity of cross bond rupture in devulcanization is further improved, and devulcanization efficiency is improved; reaction process is easy to control, no obvious harmful gas is produced, high yield and low energy consumption are realized, large-scale production of the method can be easily carried out, small pollution is posed to the environment, and a devulcanization product re-vulcanized material has high mechanical properties.
Owner:NANJING UNIV OF TECH +1

Method for photocatalytically preparing 3-sulfonyl-1,2-dihydronaphthalene compounds

The invention discloses a method for photocatalytically preparing 3-sulfonyl-1,2-dihydronaphthalene compounds. The method employs a methylene cyclopropane compound and sulfonyl chloride as initial rawmaterials, then in the presence of a photocatalyst and visible light, various 3-sulfonyl-1,2-dihydronaphthalene compounds are synthesized through C=C sulfonylation, C-C [sigma]-bond rupture and intramolecular cyclization. The method employs accessible raw materials and mild reaction conditions, is simple in operation, is wide in substrate adaptation range and is high in yield.
Owner:HUNAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Imidazole-2-thioketone compound preparation method

The invention provides an imidazole-2-thioketone compound preparation method. According to the method, an amidine compound, an isorhodanate compound, an alpha-halogenated ketone compound, and an organic solvent are mixed to obtain raw material mixed liquor; a pH value of the raw material mixed liquor is adjusted to alkalescence, and an alkalescence reaction solution is obtained; and a series cyclisation reaction of the alkalescence reaction solution is generated under heating condition to obtain the imidazole-2-thioketone compound. During the invention, heating provides the required energy forthe series cyclisation reaction, selection of the raw materials can be cooperated, under alkaline condition, through C-N bond rupture, a target product of an imidazole-2-thioketone compound is obtained, the reaction step is less, the operation is simple, control is easy, and a metal catalyst is not required; adaptability on the raw materials is strong, and the purity of the imidazole-2-thioketonecompound is high, which can achieve 98.5-99.9%, so that the method has the large market popularization value.
Owner:GANNAN NORMAL UNIV

Environment-friendly softening agent grafted regenerated rubber and preparation method thereof

ActiveCN107759714AEasy to processCompliant with REACH regulationsPolymer scienceVegetable oil
The invention provides environment-friendly softening agent grafted regenerated rubber and a preparation method thereof. The preparation method comprises the following steps: taking vegetable oil containing phenolic hydroxyl groups and unsaturated alkyl chains as a regenerated rubber softening agent, adding an organic peroxide initiator in the waste rubber powder regeneration process, initiating double-bond or three-bond rupture to the regenerated rubber to produce free radicals, combining the free radicals with free radicals formed by a thermal oxidation effect in the rubber powder regeneration process, and grafting a free softening agent in the regenerated rubber onto a main chain of the regenerated rubber. The regenerated rubber prepared by the method disclosed by the invention has theadvantages of being green, environment-friendly, non-blueing, excellent in mechanical property and stable in Mooney.
Owner:QINGDAO UNIV OF SCI & TECH

Method for synthesizing lapatinib intermediate in microchannel reactor

InactiveCN108285421AIncreased ability to adsorb catalystsWide range of responsesOrganic compound preparationChemical recyclingOrganic synthesisNitrobenzene
The invention provides a method for synthesizing a lapatinib intermediate in a microchannel reactor, and belongs to the field of anticancer drug synthesis in organic synthesis. The method solves the problems that in a traditional synthesis process of a high-temperature high-pressure catalytic hydrogenation reactor, the yield and purity are low, violent explosion easily occurs to generate dangers,dechlorination and ether oxygen bond rupture and degradation are caused when the reaction time under high temperature is long, and the recycling and reusing rate of a catalyst is low. The method for synthesizing the lapatinib intermediate in the microchannel reactor comprises the following steps that 1) 2-chloro-1-(3-fluorobenzyloxy)-4-nitrobenzene is added into an organic solvent, and the activated-carbon-loaded noble metal catalyst is added, serves as a first material and enters a preheating module of the microchannel reactor or a microreactor; 2) the preheated first material and a second material hydrogen are injected into a reaction module set of the microchannel reactor or the microreactor for a reaction respectively, a reaction solution flowing out of a cooling module is collected, and 3-chloro-4-(3-fluorobenzyloxy)aniline is obtained after post-treatment. The method is suitable for the synthesis of the lapatinib intermediate.
Owner:HEILONGJIANG XINCHUANG BIOLOGICAL TECH DEV CO LTD

Preparation method of 2,5-diaminotoluene sulfate

The invention provides a preparation method of 2,5-diaminotoluene sulfate, which mainly relates to effective separation of reaction products 2,5-diaminotoluene and o-toluidine and removal technique of o-toluidine in a 2,5-diaminotoluene sulfate product. The method comprises the following steps: by using 2-aminoazotoluene as the raw material, carrying out reducing metallic iron, zinc or other azo bond rupture reduction one-step reaction or distilling off the byproduct o-toluidine and filtering out the metal sludge, carrying out alkaline extraction, adsorbing and decolorizing to trace amounts of OT, and reacting with sulfuric acid to obtain the high-quality 2,5-TDAS, wherein the yield is 70-86%; or distilling off the byproduct o-toluidine, filtering out the metal sludge, adding sulfuric acid into the filtrate, filtering, taking out the 2,5-TDAS crude product, and repeatedly adsorbing and decolorizing with acidic / alkaline activated carbon to remove the OT in the product, wherein the total yield is 65-76%. The product 2,5-TDAS is preferably used in cosmetics due to high quality and low toxicity, and the o-toluidine content is less than 10 ppm. The alkaline extraction and activated carbon adsorption and decolorization techniques can lower the energy consumption, enhance the productivity and greatly reduce the wastewater amount.
Owner:YANCHENG DRAGON CHEM +1

Method for preparing N-(substituent) benzothiazine-4-ketone without metal participation

The invention belongs to the field of fine chemical engineering, and relates to a method for preparing N-(substituent) benzothiazine-4-ketone without metal participation. Comprising the following steps: sequentially adding N-(substituted)-2-sulfur alkyl benzamide, 1-chloromethyl-4-fluoro-1, 4-diazabicyclo [2.2. 2] octane bis (tetrafluoroborate) salt, sodium iodide and hydroiodic acid into a sealed tube containing a reaction solvent acetonitrile, heating, violently stirring and reacting to obtain the N-(substituted) benzothiazine-4-ketone. The sulfanyl group in the reaction substrate is subjected to C-S bond breakage firstly, then the chloromethyl group in the additive is transferred into the substrate, construction of C-S and C-N is achieved at the same time, and construction of the benzothiazine-4-ketone is achieved. The method has the characteristics of greenness and high efficiency.
Owner:CHANGZHOU UNIV

A suspended combustion carbonization cracking system for domestic waste and its treatment process

The invention discloses a domestic refuse suspension-type combustion carbonization pyrolysis system and a treatment technique thereof. The system is sequentially composed of a refuse conveying platform, a suspension-type pyrolysis combustion integrated furnace, a soda lye washer, a honeycomb plasma flue gas treatment device, a power pulse electrochemical photoelectric ion waste gas treatment device, a peculiar smell advanced treatment device containing high-energy oxygen nano water, a deduster and an induced fan. The treatment technique comprises the following steps: carrying out pyrolysis on domestic refuse, combusting, disacidifying by soda lye washing, carrying out plasma ionization to remove dust and tar, carrying out high-power narrow-pulse electron bombardment to promote bond rupture and recombination of stubborn harmful substances, removing flue gas and peculiar smell by using high-energy oxygen water, filtering through the deduster to remove dust, and discharging through the induced fan. The domestic refuse treatment technique disclosed by the invention has the advantages of high decrement degree and higher exhaust emission quality than national standard. The system using the technique has the advantages of low investment, simple operation, high safety and environment friendliness, low carbon and energy saving, and can comprehensively and basically solve the problem in domestic refuse.
Owner:安徽未名科键环境有限公司

Practical novel method for nonmetal-catalyzed silicon disprotection

The invention relates to an efficient and mild novel method for organosilicone reagent carbon-silicon bond rupture. According to the reaction method, metal alkali which is cheap and easy to obtain is taken as a catalyst, a common commercial solvent serves as a reaction solvent and a hydrogen source, a trimethyl aryl silicon reagent or an aryl alkynyl silicon reagent can be catalyzed smoothly in air under mild conditions to selectively undergo carbon-silicon bond cracking hydrogenation reaction, a substrate is wide in universality, and functional group compatibility is excellent. For the first time the carbon-silicon bond rupture reaction without transition metal catalysis is implemented innovatively, the limitation that in a conventional method, greatly excessively inorganic base or expensive metal catalysts need to be used to perform silicon disprotection is also overcome, and a novel strategy is provided for disprotection of organosilicone groups in lab preparation and industrial production.
Owner:TAIZHOU UNIV

Method used for preparing pyrrolo[3, 2,1-ij] quinolinone compound

The invention belongs to the technical field of organic chemical synthesis, and more specifically relates to a method used for preparing a pyrrolo[3, 2,1-ij] quinolinone compound. The method comprisesfollowing steps: in the presence of a catalyst, a Lewis acid, and an zinc reagent, an indoline compound represented by formula II and an alkyne represented by formula III are subjected to C-H bond activation / C-N bond rupture reaction so as to obtain the pyrrolo[3, 2,1-ij] quinolinone compound represented by formula. According to the method, indoline is reacted with the alkyne in the presence of the catalyst, the Lewis acid, and the zinc reagent in a solvent, so that synthesis of the pyrrolo[3, 2,1-ij] quinolinone compound is realized.
Owner:INST OF CHEM CHINESE ACAD OF SCI

Biosensors for detecting bond rupture

A biosensor comprises a surface onto which bio-macromolecules are bound, the surface and bio-macromolecules being immersed in liquid, a bond rupture detector associated with the surface and arranged to detect the rupture of bonds between the bio-macromolecules and a target substance ( 6 ), and an oscillator ( 8 ) associated with the liquid and spaced from the surface and arranged to produce oscillations in the liquid to cause bonds between the bio-macromolecules and the target substance ( 6 ) to rupture.
Owner:IND RES LTD

Formation method of semiconductor structure

A method for forming a semiconductor structure, comprising: providing a semiconductor substrate formed with several grooves; forming a first silicon oxide layer on the side walls and bottom surfaces of the grooves and the surface of the semiconductor substrate, and the surface of the first silicon oxide layer Part of the silicon atoms in the silicon oxide layer are connected to the ethoxy group; an inert plasma treatment process is performed to break the bond between the ethyl group and the oxygen atom in the ethoxy group on the surface of the first silicon oxide layer to form a silicon-oxygen dangling bond; perform water vapor treatment process, the oxygen in the silicon-oxygen dangling bond on the surface of the first silicon oxide layer is combined with hydrogen to form a silicon-oxygen-hydrogen bond; an ultraviolet treatment process is performed to remove the hydrogen element in the silicon-oxygen-hydrogen bond on the surface of the first silicon oxide layer to form Silicon-oxygen-silicon bond; perform a second high aspect ratio deposition process to form a second silicon oxide layer on the surface of the first silicon oxide layer; remove the first silicon oxide layer and the second silicon oxide layer on the semiconductor substrate, and place in the trench A shallow trench isolation structure is formed. The compactness of the shallow trench isolation structure of the present invention is increased.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Biosensors for Detecting Bond Rupture

A biosensor comprises a surface onto which bio-macromolecules are bound, the surface and bio-macromolecules being immersed in liquid, a bond rupture detector associated with the surface and arranged to detect the rupture of bonds between the bio-macromolecules and a target substance (6), and an oscillator (8) associated with the liquid and spaced from the surface and arranged to produce oscillations in the liquid to cause bonds between the bio-macromolecules and the target substance (6) to rupture.
Owner:IND RES LTD

Preparation method for methylphenylsiloxane ring

The present invention relates to the technical field of organosilicone industry, and is to solve the problem in the prior art that the hydrolysis oil requires repeated water washing in the process of synthetizing methylphenylsiloxane ring. The present invention provides a preparation method for methylphenylsiloxane ring. By the method, hydrolysis-generated HCl can be quantitatively absorbed to ensure that the hydrolysis oil is neutral or weakly alkaline. The oil can be used for cracking and rearrangement without special washing with water, at the same time the Si-Ph bond rupture is restrained maximally, the production of crosslinking byproducts are reduced, and the yield of the target product is improved.
Owner:HANGZHOU NORMAL UNIVERSITY

Method for synthesizing alpha-ethyl azacycloheptane-2-one substituted pyridine compounds

The invention discloses a method for synthesizing alpha-ethyl azacycloheptane-2-one substituted pyridine compounds and belongs to the technical field of organic chemistry. According to the method, DBUand 1,3-butadiyne compounds are taken as reaction raw materials and subjected to heating reaction in alkaline cesium salt and an acetonitrile solution under promoting action of CO2, and the polysubstituted pyridine compounds are obtained. C=N bond rupture is promoted through CO2 activation, the method is simple and convenient, conditions are mild, the functional polysubstituted pyridine compoundsare directly constructed, and the synthesis method of pyridine heterocyclic rings is broadened.
Owner:HENAN NORMAL UNIV

Preparation method of dual network sulfonated polyphenyl ether/acrylic composite material

The invention discloses a preparation method of a dual network sulfonated polyphenyl ether / acrylic composite material. The composite material is composed of a double-layer network, wherein the first layer is a network formed by crosslinking of sulfonated polyphenyl ether and an acrylate monomer; and the second layer is a network formed by crosslinking of metal ions and sulfonate of sulfonated polyphenyl ether. The preparation method of the dual network composite material comprises the following steps: S1) dissolving sulfonated polyphenyl ether, the acrylate monomer, a cross-linking agent and an initiator in a solvent and carrying out a polymerization reaction to obtain organogel; and S2) mixing the organogel and an ionic compound solution to carry out an ionic crosslinking reaction. By constructing the multi-layer network structure in the acrylate elastomer, strength of the material is enhanced; and through dissipation of energy by ionic bond rupture, toughness of the material is enhanced. According to the prepared dual network sulfonated polyphenyl ether / acrylic composite material, strength is enhanced while toughness is correspondingly increased.
Owner:INST OF CHEM ENG GUANGDONG ACAD OF SCI

Formation method of semiconductor structure

The invention provides a formation method of a semiconductor structure. The formation method of a semiconductor structure comprises the steps: providing a semiconductor substrate, wherein a plurality of grooves are formed in the semiconductor substrate; forming a first oxygen ambient silica layer on the surface of the side wall and the bottom of the grooves and on the surface of the semiconductor structure, wherein part of silicon atoms on the surface of the first oxygen ambient silica layer are connected with ethoxy; performing an inertia plasma processing technology to realize bond rupture between the ethyl and oxygen atoms in the ethoxy on the surface of the first oxygen ambient silica layer to form a silicon oxygen dangling bond; performing a water vapour processing technology to realize combination of the oxygen and the hydrogen in the silicon oxygen dangling bond on the surface of the first oxygen ambient silica layer to form a silicon oxygen hydrogen bond; performing an ultraviolet processing technology to remove the protium in the silicon oxygen hydrogen bond on the surface of the first oxygen ambient silica layer to form a silicon oxygen silicon bond; performing a second high aspect ratio deposition technology to form a second oxygen ambient silica layer on the surface of the first oxygen ambient silica layer; and removing the first oxygen ambient silica layer and the second oxygen ambient silica layer on the semiconductor substrate, and forming a shallow groove isolation structure in the grooves. The formation method of a semiconductor structure can increase the compactness of the shallow groove isolation structure.
Owner:SEMICON MFG INT (SHANGHAI) CORP
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