The present invention relates to a circular
molybdenum nanogrid sample support having an upper and lower dual
silicon post structure and belongs to the field of high-precision sample support technology used in
electron microscope analysis equipment. The sample support of the present invention has a structure in which two circular
molybdenum (Mo) bodies are precisely interlocked and joined, and within this structure,
silicon (Si) posts of various shapes are arranged at the upper and lower portions, respectively. Through this upper and lower dual
silicon post structure, two samples can be simultaneously fixed and TEM, SEM, or FIB analysis can be performed using a single loading process, thereby maximizing analysis efficiency. Furthermore, the uppermost portion of the silicon posts can be processed into a flat or D-
cut shape; this D-
cut shape may or may not penetrate downwards, and allows for uniform or non-uniform shape distribution between the posts, enabling
adaptation to various sample shapes and analysis purposes. The circular
molybdenum nanogrid sample support of the present invention simultaneously secures high
mechanical strength and
conductivity, and enables precise
mass production through
semiconductor process-based MEMS technology. Thus, the present invention provides excellent technical effects in terms of simultaneous analysis of multiple samples, reduction of
background noise, reprocessing of samples, and compatibility with various analytical instruments.