The invention discloses a
silicon-carbon negative
electrode material skid-mounted production
system based on a vapor deposition method and a production method thereof, and the
system comprises a skid, and a preheater, a feeding tank, a reactor, a
storage tank, a blowback gas A
storage tank for the feeding tank, a blowback gas B
storage tank for the feeding tank, a
buffer tank, a gasifier, a pipeline valve instrument and an
electric control system which are integrated on the skid, dispersion units are integrated through skid-mounted integration, pipeline connection is reduced, the
silane utilization rate is larger than or equal to 85%, hundred-
ton-level requirements are met, the problem that existing equipment is insufficient in
mass production capacity is solved, the temperature of a preheater and a reactor is accurately controlled, the gas environment is cooperatively adjusted, the deposition uniformity of
silicon nanoparticles is improved by 25%, the thickness deviation of a soft
carbon coating layer is smaller than or equal to 0.5 nm, and the application range is wide. And the product quality stability is obviously improved.