The present invention relates to a
photoresist composition comprising a
photoacid generator and at least one novel
polymer comprising at least one unit as described by structure 1, where, either (i) R1 is an aliphatic cyclic unit of a
polymer, R2 is selected from H, F, (C1-C8)
alkyl, (C1-C8)fluoroalkyl, cycloalkyl, cyclofluoroalkyl, and (CR3R4)p(CO)OR5, and Rf is selected from F, H, (C1-C8)
alkyl, or a fully or partially fluorinated
alkyl, and cyclofluoroalkyl, or (ii) R1 and R2 combine to form an aliphatic cyclic unit of a
polymer, and Rf is selected from F, H, (C1-C8)alkyl and a fully or partially fluorinated alkyl, and cyclofluoroalkyl, or (ii) R1 and Rf combine to form an aliphatic cyclic unit of a polymer, and R2 is selected from H, F, (C1-C8)alkyl, (C1-C8)fluoroalkyl, cycloalkyl, cyclofluoroalkyl, and (CR3R4)p(CO)OR5; and, R3 and R4 are independently H, F, (C1-C8)alkyl, (C1-C8)fluoroalkyl, cycloalkyl, cyclofluoroalkyl, (CR3R4)p(CO)OR5, R3 and R4 may combine to form an alkylspirocyclic or a fluoroalkylspirocyclic group, X is selected from (C1-C8)alkylene, (C1-C8)fluoroalkylene, O(C1-C8)alkylene, O(C1-C8)fluoroalkylene, cycloalkyl and fluorinatedcycloalkyl, R5 is H or an
acid labile group, m=0-1, and p=1-4. The invention also relates to a process for imaging the
photoresist composition of the present invention.