The invention relates to a multi-
chip fan-out packaging structure with a cavity and a manufacturing method of the multi-
chip fan-out packaging structure. The multi-
chip fan-out packaging structure comprises at least two chips, and the first surface of each chip is provided with a bonding pad and a functional region. The multi-chip fan-out packaging structure also comprises a first carrier, a second carrier, a filling layer, a
metal rewiring layer, a first insulating layer, a second insulating layer and a
signal port. The first carrier is connected to the first surface of the second carrier andis provided with a through hole; the chip is located in the through hole, and the second surface of the chip is connected to the first surface of the first carrier; the filling layer covers the firstcarrier and the first surface of the chip and is provided with a first opening; the first insulating layer covers the surface of the filling layer, so that the cavity is formed in the functional area, and a second opening is formed in the bonding pad; the
metal rewiring layer is positioned on the upper surface of the first insulating layer and is electrically connected with the bonding pad; the second insulating layer covers the surfaces of the first insulating layer and the
metal rewiring layer and is provided with a third opening; and the
signal port is located at the third opening and is electrically connected with the metal rewiring layer. The structure can improve the packaging reliability, is small in size, and reduces the cost.