The invention discloses
microwave plasma vacuum coating equipment and a use method. The equipment comprises a
microwave antenna, a
microwave source, an air inflow device, an air exhaust device, a
plasma vacuum cavity and a moving device. The vacuum air exhaust device is arranged outside the plastic vacuum cavity and connected with the cavity through a pipeline, the microwave antenna and the movingdevice are arranged in the
plasma vacuum cavity, and the microwave source is arranged outside the cavity and connected with the microwave antenna in the cavity. The use method of the equipment includes the following steps that the plasma vacuum cavity is vacuumized, and a to-be-coated product is pre-treated, coated and the like. The
sedimentation rate of
coating matter is increased and the
coating production efficiency of the
coating matter is improved with a plasma
chemical vapor deposition method, the uniformity and consistency of coating are improved, meanwhile, the waterproof, sweat-proof, damp-proof,
corrosion-resistant and
solvent-resistant performance and other protection effects of coatings are also improved, and the microwave plasma
vacuum coating equipment can be used for the occasions of coating such as various PCBs, PCBAs, electronic products, electric appliance parts, electronic semi-finished products,
metal, electronic components, semiconductors,
integrated circuit boards and plastic products.