The invention discloses a
solar cell manufacturing process. The
solar cell manufacturing process comprises the following steps: S1, cleaning and texturing; S2,
boron diffusing; S3, cleaning to remove the BSG layer and
polishing the back surface; S4, depositing a tunneling
oxide layer and a doped
amorphous silicon layer on the back surface; S5, preparing an aluminum
oxide and
silicon nitride laminated layer on the front side; S6, annealing; S7, depositing a
silicon nitride anti-reflection
protection layer on the back surface; and S8, carrying out silk-
screen printing,
sintering testing and sorting. According to the invention, the process of depositing aluminum
oxide and
silicon nitride films in the front surface is adjusted to be before the annealing process, and the
passivation capability of aluminum oxide and
silicon nitride is fully excited by using long-time high temperature during annealing, so that the
cell efficiency is improved; and secondly, the front surface of the silicon
wafer is covered with an aluminum oxide film and a
silicon nitride film in advance, so that the situation that impurities are introduced into the front surface during annealing to affect the battery performance is avoided, meanwhile, the cleaning procedure after annealing can be omitted, the technological process is simplified to 8 steps from 9 steps in the prior art, and therefore the production efficiency is effectively improved.